2022
DOI: 10.1109/jeds.2022.3169702
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LDMOS Drift Region With Field Oxides: Figure-of-Merit Derivation and Verification

Abstract: We analytically and numerically investigate the performance of Laterally-Diffused Metal-Oxide-Semiconductor (LDMOS) transistors with Semi-circular Field OXide (S-FOX) focusing on midvoltage (30 V -100 V) power applications. We derive an analytical relation between breakdown voltage and on-resistance to realize the ideal behavior of the drift region for an LDMOS with S-FOX. Then, we find the optimized drift doping concentration minimizing the on-resistance at a given breakdown voltage. We introduce a new figure… Show more

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Cited by 4 publications
(4 citation statements)
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“…Ref. [26] Baliga's curve seems high than that of Ref. [25], but the author didn't give out explanations.…”
Section: Bfom Resultsmentioning
confidence: 90%
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“…Ref. [26] Baliga's curve seems high than that of Ref. [25], but the author didn't give out explanations.…”
Section: Bfom Resultsmentioning
confidence: 90%
“…[25] and Ref. [26] This article has been accepted for publication in IEEE Journal of the Electron Devices Society. This is the author's version which has not been fully edited and content may change prior to final publication.…”
Section: Bfom Resultsmentioning
confidence: 99%
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“…Manually determining the optimal FOX is a painstaking process. A traditional method to understand the behavior of LDMOS with field oxide structure is to find the analytical solution [17], [18]. There is some research combine TCAD simulation and machine learning to accelerate the development of simulation works in different areas [19], [20], [21], [22], [23], [24], [25], but to date, no automated methodology is available to determine the optimal doping profile for a given FOX shape.…”
Section: Introductionmentioning
confidence: 99%