Design and Simulation Optimization of an Ultra-Low Specific On-Resistance LDMOS Device
Shaoxin Yu,
Weiheng Shao,
Rongsheng Chen
et al.
Abstract:The design of LDMOS (Lateral double diffused metal oxide semiconductor) devices with CFP (Contact field plate) has been of great significance in recent years, according to its advantages of low resistance and high switch efficiency. In this paper, this ultra-low , (Specific on-resistance) LDMOS device is simulated, designed, and fabricated. The effects on FOM (Figures-of-merits) characters from physical dimensions, including field plate length L, field plate thickness H, and slot contact width W, have been ana… Show more
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