Lateral Spurious Mode Suppression in Lithium Niobate A1 Resonators

Yang, Yansong; Gao, Liuqing; Lu, Ruochen; Gong, Songbin

doi:10.1109/tuffc.2020.3049084

Cited by 30 publications

(11 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Through this method, this work successfully demonstrated an A1 mode LiNbO 3 Lamb wave resonator working at 1.65 GHz with suppressed spurious modes and high performance. In another work, Yang et al [138] proposed another method to optimize the electric field distribution of A1 mode Z-cut LiNbO 3 Lamb wave resonators to suppress spurious modes. In this work, the IDTcovered LiNbO 3 was thinned while the uncovered LiNbO 3 remained unchanged.…”

Section: Spurious Modes Of Linbo 3 -Based Lamb Wave Resonatorsmentioning

confidence: 99%

Micromachined piezoelectric Lamb wave resonators: a review

Lu,

Ren

2023

J. Micromech. Microeng.

View full text Add to dashboard Cite

With the development of next-generation wireless communication and sensing technologies, there is an increasing demand for high-performance and miniaturized resonators. Micromachined piezoelectric Lamb wave resonators are becoming promising candidates because of their multiple vibration modes, lithographically defined frequencies, and small footprint. In the past two decades, micromachined piezoelectric Lamb wave resonators based on various piezoelectric materials and structures have achieved considerable progress in performance and applications. This review focuses on the state-of-the-art Lamb wave resonators based on aluminum nitride (AlN), aluminum scandium nitride (AlxSc1-xN), and lithium niobate (LiNbO3), as well as their applications and further developments. The promises and challenges of micromachined piezoelectric Lamb wave resonators are also discussed. It is promising for micromachined piezoelectric Lamb wave resonators to achieve higher resonant frequencies and performance through advanced fabrication technologies and new structures, the integration of multifrequency devices with radio frequency (RF) electronics as well as new applications through utilizing nonlinearity and spurious modes. However, several challenges, including degenerated electrical and thermal properties of nanometer-scale electrodes, accurate control of film thickness, high thin film stress, and a trade-off between electromechanical coupling efficiencies and resonant frequencies, may limit the commercialization of micromachined piezoelectric Lamb wave resonators and thus need further investigation. Potential mitigations to these challenges are also discussed in detail in this review. Through further painstaking research and development, micromachined piezoelectric Lamb wave resonators may become one of the strongest candidates in the commercial market of RF and sensing applications.

show abstract

Section: Spurious Modes Of Linbo 3 -Based Lamb Wave Resonatorsmentioning

confidence: 99%

Micromachined piezoelectric Lamb wave resonators: a review

Lu,

Ren

2023

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…27) However, the f s of XBAR is always affected by both the longitudinal (x-axis) mode and the vertical (z-axis) mode. With the coupling of the vertical and longitudinal mode, the resonant frequency f s of XBAR is given by: [28][29][30][31][32][33]…”

Section: Piementioning

confidence: 99%

Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

Wen

Xu²,

Liu³

et al. 2022

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

This paper reports on a design journey for laterally-excited bulk acoustic wave resonator (XBAR) with adjustable piezoelectric coupling coefficient (K2). The vibration principle and resonant characteristics of XBAR are investigated by theoretical and simulation analysis, and the way to adjust K2 by introducing two grooves in the area between interdigital electrodes (IDEs) is proved to be effective by using finite element method (FEM) simulation and the Modified Butterworth-Van Dyke model with series capacitor Cr (MBVD-Cr) first, and then the impact of groove depth (Hg) and groove width (Wg) on K2 of XBAR is theoretically analyzed. Specifically, the K2 can be effectively adjusted by setting different values of Hg and Wg. After optimization, the maximum regulation range of K2 is from 2.02% to 45.05%. The fluted XBAR has a remarkable potential in building XBAR bandpass filter for specific frequency band, which greatly optimizes the XBAR filter design.

show abstract

“…However, that is not to say A1 spurious modes are a solved problem. Transverse and other eigenmodes that cannot be addressed by adjusting pitch width would have to be overcome by more innovative methods (e.g., recessed electrodes [57] or periodically installed release windows [58], [59]). Perhaps, the large k 2 seen in the modes only serves as a motivator for addressing technical kinks in harnessing these modes.…”

Section: Higher Coupling Operational Modesmentioning

confidence: 99%

Microwave Acoustic Devices: Recent Advances and Outlook

Gong

Yang

et al. 2021

IEEE J. Microw.

Self Cite

View full text Add to dashboard Cite

This paper presents a short review of the microwave acoustics area, where exciting material innovations and performance advancements have been made in the past decade. The ever-growing demand for more sophisticated passive signal processing functions on-chip has fueled these developments. As a result, microwave acoustic devices have maintained performance leadership in mobile applications. By evaluating three fundamental parameters, namely electromechanical coupling (k 2 ), quality factors, and frequency scalability, of microwave acoustics, this paper aims to, extensively but not exhaustively, capture the rationales behind approaches achieving higher performance microsystems. Outlooks for different material systems and addressing their underlying challenges are also offered in hopes of establishing a balanced roadmap for future microwave acoustics development.

show abstract

Lateral Spurious Mode Suppression in Lithium Niobate A1 Resonators

Cited by 30 publications

References 27 publications

Micromachined piezoelectric Lamb wave resonators: a review

Micromachined piezoelectric Lamb wave resonators: a review

Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient

Microwave Acoustic Devices: Recent Advances and Outlook

Contact Info

Product

Resources

About