2006
DOI: 10.1063/1.2392673
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Lasing in GaN microdisks pivoted on Si

Abstract: Arrays of pivoted GaN microdisks have been fabricated on a GaN / Si material by a combination of dry and wet etching. The Si material beneath the GaN microdisks is removed by wet etching, leaving behind a fine pillar to support the disks. Raman spectroscopy reveals substantial strain relaxation in these structures. Resonant modes, corresponding to whispering gallery modes, are observed in the photoluminescence spectra. Stimulated emission is achieved at higher optical pumping intensities.

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Cited by 87 publications
(47 citation statements)
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“…Similar undercut microdisk structures have also been demonstrated by controlled wet-etch removal of the underlying Si substrate using GaN-on-Si materials. 12,13 There also are many other studies on GaN WGM microcavities based on self-assembled micro/ nano crystals using bottom-up methods, including microscale pyramids, hexagonal disks, and pillars. [14][15][16] However, it is difficult to achieve precise control over the locations, morphologies, dimensions, and uniformities of these microstructures during growth.…”
mentioning
confidence: 99%
“…Similar undercut microdisk structures have also been demonstrated by controlled wet-etch removal of the underlying Si substrate using GaN-on-Si materials. 12,13 There also are many other studies on GaN WGM microcavities based on self-assembled micro/ nano crystals using bottom-up methods, including microscale pyramids, hexagonal disks, and pillars. [14][15][16] However, it is difficult to achieve precise control over the locations, morphologies, dimensions, and uniformities of these microstructures during growth.…”
mentioning
confidence: 99%
“…visible to UV wavelengths [12][13][14][15] . An outstanding challenge in achieving coupled QDcavity systems is the need to realize both spatial and frequency resonance of QD to cavity modes.…”
mentioning
confidence: 99%
“…With smooth bottom and top surfaces as indicated in the atomic force microscopy (AFM) images of Fig. 3c, optically pumped lasing from these microdisks in the UV range has been demonstrated at low temperatures ($4.3 K) [30]. Similar deep undercut GaN microdisks supported by narrow Si posts have been fabricated by a nonplasma dry releasing technique [48].…”
Section: Pivoted Gan Microdisks On Simentioning
confidence: 97%