2017
DOI: 10.3103/s8756699017050077
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Laser technologies in micro-optics. Part 1. Fabrication of diffractive optical elements and photomasks with amplitude transmission

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Cited by 22 publications
(11 citation statements)
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“…Каждый такой треугольник можно спроецировать на поверхность голограммы и создать на его поверхности дифракционную решётку тоже по (1,2). Эшелетт при таких маленьких периодах решётки создавать трудно, хотя начальные шаги в этом направлении уже ведутся [23,24,25]. Подготовка технологии записи голографических решёток, приведённых на рис.…”
Section: запись голограмм и объективные измерения их структурыunclassified
“…Каждый такой треугольник можно спроецировать на поверхность голограммы и создать на его поверхности дифракционную решётку тоже по (1,2). Эшелетт при таких маленьких периодах решётки создавать трудно, хотя начальные шаги в этом направлении уже ведутся [23,24,25]. Подготовка технологии записи голографических решёток, приведённых на рис.…”
Section: запись голограмм и объективные измерения их структурыunclassified
“…The algorithm for calculating the required parameters was built based on Equations (1)-(3) above. The temperature distribution on the metallic film surface during a complete j-th pulse (consisting of the heating and cooling phases) as a function of the absorptance can be determined from Equation (2). From that based on the solution of Equation (1) by Libenson [35], one could easily calculate the oxide layer thickness formed by high-temperature oxidation, and the oxide layer thickness is considered as the total thickness of the previously formed oxide layers and the newly formed oxide layer after the j-th pulse.…”
Section: Simulation Proceduresmentioning
confidence: 99%
“…Micro and nanotopologies on thin films provide unique possibilities for photonic needs [ 1 ] to fabricate diffractive optical elements (DOEs) [ 2 ], metalenses [ 3 ], nanoantenna arrays [ 4 , 5 , 6 , 7 ], etc. The listed applications set requirements for the manufacturing process of each surface element, namely, the shape, size, composition, and optical properties.…”
Section: Introductionmentioning
confidence: 99%
“…3 Over the years, the efficiency of DOEs' design algorithms have been increased, 4 while fabrication methods are still under continuous study. 5 Respect to design techniques, Gerchberg-Saxton algorithm is commonly used. It is a bidirectional iterative method which is used under far-field conditions and presents a high performance.…”
Section: Introductionmentioning
confidence: 99%