Laser bending of etched silicon microstructures

Gärtner, Eva; Frühauf, Joachim; Löschner, Udo; Exner, Horst

doi:10.1007/s005420000065

Cited by 25 publications

(11 citation statements)

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“…As the understanding of the process developed, more varied substrates were explored such as titanium, [27,73] and copper alloys [74,75], hoping to develop new ways to form 3D structures for aerospace and electrical applications. Researchers have also explored laser forming on non-metallic substrates and have bent typically brittle materials such as silicon [76][77][78], ceramics [41,79], and glass [79,80]. More recently, there have also been demonstrations of the laser forming of more complex structures, such as metal foams [81,82] and laminates [83].…”

Section: Laser and Substrate Selectionmentioning

confidence: 99%

Making Light Work of Metal Bending: Laser Forming in Rapid Prototyping

Bachmann

Dickey

Lazarus

2020

QuBS

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Lasers can be used to bend 2D metal sheets into complex 3D objects in a process called ‘laser forming.’ Laser forming bends metal sheets by locally heating the sheets to generate plastic strains and is an established metal bending technology in the shipbuilding industry. Recent studies have investigated the laser forming of thin metal parts as a complementary rapid prototyping technology to metal 3D printing. This review discusses the laser forming process, beginning with the mechanisms before covering various design considerations. Laser forming for the rapid manufacturing of metal parts is then reviewed, including the recent advances in process planning, before highlighting promising future research directions.

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Section: Laser and Substrate Selectionmentioning

confidence: 99%

Making Light Work of Metal Bending: Laser Forming in Rapid Prototyping

Bachmann

Dickey

Lazarus

2020

QuBS

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“…Dearden et al [3] described a number of new techniques in laser bending for macro-and micro-scale applications. Gartner et al [4] realized the highest precision deformation of silicon microstructures using laser bending technology. Zhang et al [5] described a laser based technique to adjust curvatures of silicon micro-cantilevers used for chemical and biological detection.…”

Section: Introductionmentioning

confidence: 99%

Laser Micro Bending Process of Ti6Al4V Square Bar

Chen

Zhang

2014

Micromachines

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Abstract:Laser micro bending process of Ti6Al4V square bar are carried out using a 3D thermo-mechanical finite element analytical model (FEM). The transient temperature fields, displacement fields, stress fields and strain fields are obtained and analyzed. The results show that the bending angel during laser micro bending process is in good agreement with experimental measurements. The effects of process parameters on temperature and deformation are also investigated here. During the bending process the temperature increases with the increase of the laser power and the irradiation time. Radiation of the laser beam yields to a rapid temperature increase at the irradiated surface, which leads to the high temperature gradients between the irradiated surface and the unirradiated surface, which suggest that the mechanism of laser micro bending is the temperature gradient mechanism. The z displacement of forward direction and reverse direction increase when the laser power and irradiation time increase. Laser micro bending process can obtain the larger bending angles reverse to laser beam using higher laser power and shorter irradiation time.

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“…Thus, this process may be useful for forming brittle materials that is easy to fracture by tensile stress and very strong against compressive stress. There are a lot of reports about forming sheets of carbon steel, stainless steel (1) , aluminum alloy (2), (3) , titanium alloy (4) and plastics, these are all ductile material, however, a few researches are performed about forming brittle materials, silicon and glass, by laser forming process (5), (6) . If laser beam is irradiated to thin film metallic glasses, it is considerable that those materials are heated up and become ductile and easy to form plastically.…”

Section: Introductionmentioning

confidence: 99%

Laser Forming of Thin Film Metallic Glass

Otsu

Ide

Sakùrai

et al. 2009

JMMP

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Palladium based thin film metallic glasses were plastically bent by laser forming process. Thin films of Pd 77 Cu 6 Si 17 with a thickness of 0.028mm and Pd 40 Ni 40 P 20 with a thickness of 0.017mm were used for specimen. A 50W YAG laser was employed for forming. Variation of bending angle was investigated by changing working conditions such as laser power, laser operation mode (continuous wave and Q-switch pulsed modes), Q-sw frequency, scanning velocity and scanning number. From the experimental results, both thin films of Pd 77 Cu 6 Si 17 and Pd 40 Ni 40 P 20 were successfully bent for more than 85º. The formed thin films did not crystallize but were amorphous. As scanning number increased, bending angle also increased but increasing rate decreased. When laser power and scanning velocity were changed, bending angle had a peak. When Q-sw frequency was changed, bending angle had a broad peak in Pd 77 Cu 6 Si 17 case, but that was larger as frequency was smaller in Pd 40 Ni 40 P 20 case.

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Laser bending of etched silicon microstructures

Cited by 25 publications

References 0 publications

Making Light Work of Metal Bending: Laser Forming in Rapid Prototyping

Making Light Work of Metal Bending: Laser Forming in Rapid Prototyping

Laser Micro Bending Process of Ti6Al4V Square Bar

Laser Forming of Thin Film Metallic Glass

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