2016
DOI: 10.1016/j.solmat.2016.05.024
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ITO/SiOx:H stacks for silicon heterojunction solar cells

Abstract: A method of reducing optical losses in the transparent conductive oxides (TCO) used in silicon heterojunction solar cells without compromising with series resistance is described. In the method the thickness of a TCO is reduced two-three times and a hydrogenated dielectric is deposited on top to form a double layer antireflection coating. The conductivity of a thin TCO is increased due to the effect of hydrogen treatment supplied from the capping dielectric during the post deposition annealing. The optimized c… Show more

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Cited by 54 publications
(37 citation statements)
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(13 reference statements)
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“…Reducing the rear-side parasitic absorption would require inserting a thickenough low-refractive index layer between the silicon wafer and the metal layers. [33] In summary, we have shown the influence of the metal capping layer on MgF x /Mg electron-selective contact stacks. The 1.5 nm MgF x /20 nm Mg/100 nm Al as electron-selective contacts is applied in the proof of concept of dopant-free MLBC solar cells with a high conversion efficiency over 22.1%.…”
mentioning
confidence: 73%
See 1 more Smart Citation
“…Reducing the rear-side parasitic absorption would require inserting a thickenough low-refractive index layer between the silicon wafer and the metal layers. [33] In summary, we have shown the influence of the metal capping layer on MgF x /Mg electron-selective contact stacks. The 1.5 nm MgF x /20 nm Mg/100 nm Al as electron-selective contacts is applied in the proof of concept of dopant-free MLBC solar cells with a high conversion efficiency over 22.1%.…”
mentioning
confidence: 73%
“…The J SC losses in the long‐wavelength region ranging from 1000 to 1200 nm are mostly caused by the parasitic absorption of the a‐Si:H (i)/MoO x /Ag and MgF x /Mg/Al/Ag layers. Reducing the rear‐side parasitic absorption would require inserting a thick‐enough low‐refractive index layer between the silicon wafer and the metal layers …”
mentioning
confidence: 99%
“…On the other hand, a plated metallization is intrinsically a low temperature process. Plated approaches using highly conductive and less expensive copper are currently investigated . The Cu‐based contacts can be electroplated simultaneously on both‐sides of the solar cells and TCOs like indium‐tin‐oxide (ITO) are good barrier to metals diffusion into silicon .…”
Section: Introductionmentioning
confidence: 99%
“…Plated approaches using highly conductive and less expensive copper are currently investigated. [12][13][14][15][16][17][18][19][20] The Cu-based contacts can be electroplated simultaneously on bothsides of the solar cells and TCOs like indium-tin-oxide (ITO) are good barrier to metals diffusion into silicon. [21] This manufacturing of plated bifacial SHJ solar cells intends to increase the contacts conductivity and reduces drastically the precious Ag consumption.…”
Section: Introductionmentioning
confidence: 99%
“…As a result, nc-SiO x :H is widely applicable as a window, back contact (BC) or intermediate reflector (IR) layer in various solar cell concepts. So far, ncSiO x :H has been utilized in photovoltaic devices like thin-film (TF) silicon solar cells [3,[9][10][11], multi-junction solar cells [12][13][14], crystalline silicon solar cells with diffused emitters [6], and silicon heterojunction (SHJ) solar cells [15][16][17][18]. Each of these applications requires specific optoelectronic properties in order to improve the overall spectral utilization and the response of the solar cell.…”
Section: Introductionmentioning
confidence: 99%