Conference on Lasers and Electro-Optics 2019
DOI: 10.1364/cleo_at.2019.jth2a.45
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ITO Mach-Zehnder Modulator on Si

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Cited by 4 publications
(2 citation statements)
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“…A recent paper reported indium tin oxide (ITO) based modulator giving a V p L of 0.059 VÁcm, but with a loss over 33 dB. 32 The modulator presented here has therefore significant advantage compared to a non-MEMS based modulator in this metric. Due to an exponential decay of the optical field from the waveguide, the phase sensitivity improves with smaller gaps.…”
mentioning
confidence: 90%
“…A recent paper reported indium tin oxide (ITO) based modulator giving a V p L of 0.059 VÁcm, but with a loss over 33 dB. 32 The modulator presented here has therefore significant advantage compared to a non-MEMS based modulator in this metric. Due to an exponential decay of the optical field from the waveguide, the phase sensitivity improves with smaller gaps.…”
mentioning
confidence: 90%
“…Typical integrated optical systems include generation [1][2][3][4], coupling , splitting , modulation [82][83][84][85][86][87][88][89][90][91][92][93][94][95][96][97][98], and detection [99][100][101][102] of photons. Among them, on-chip beam splitting is not only the key link of photon propagation, but also an important part of integrated devices such as Mach Zehnder interferometer (MZI) [103,104] and microcavity [105][106][107]. It is closely related to the efficient utilization of sources and low loss propogation.…”
Section: Introductionmentioning
confidence: 99%