Optical read-out of motion is widely used in sensing applications. Recent developments in micro- and nano-optomechanical systems have given rise to on-chip mechanical sensing platforms, potentially leading to compact and integrated optical motion sensors. However, these systems typically exploit narrow spectral resonances and therefore require tuneable lasers with narrow linewidth and low spectral noise, which makes the integration of the read-out extremely challenging. Here, we report a step towards the practical application of nanomechanical sensors, by presenting a sensor with ultrawide (∼80 nm) optical bandwidth. It is based on a nanomechanical, three-dimensional directional coupler with integrated dual-channel waveguide photodiodes, and displays small displacement imprecision of only 45 fm/Hz1/2 as well as large dynamic range (>30 nm). The broad optical bandwidth releases the need for a tuneable laser and the on-chip photocurrent read-out replaces the external detector, opening the way to fully-integrated nanomechanical sensors.

Spectral sensing is increasingly used in applications ranging from industrial process monitoring to agriculture. Sensing is usually performed by measuring reflected or transmitted light with a spectrometer and processing the resulting spectra. However, realizing compact and mass-manufacturable spectrometers is a major challenge, particularly in the infrared spectral region where chemical information is most prominent. Here we propose a different approach to spectral sensing which dramatically simplifies the requirements on the hardware and allows the monolithic integration of the sensors. We use an array of resonant-cavity-enhanced photodetectors, each featuring a distinct spectral response in the 850-1700 nm wavelength range. We show that prediction models can be built directly using the responses of the photodetectors, despite the presence of multiple broad peaks, releasing the need for spectral reconstruction. The large etendue and responsivity allow us to demonstrate the application of an integrated near-infrared spectral sensor in relevant problems, namely milk and plastic sensing. Our results open the way to spectral sensors with minimal size, cost and complexity for industrial and consumer applications.

DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:

On-chip spectrometers with tailored spectral range and compact footprint have been pursued widely in the last decade. Splitting different frequencies typically requires a propagation length that scales inversely with the frequency resolution, which leads to a trade-off between resolution and size. Scattering media in the diffusive regime provide a long light path and multipath interference in a compact area, resulting in strong dispersive properties that can be used for on-chip compressive spectrometry. However, the performance suffers from the low light transmission through the diffusive medium. It has been found that there exist “open channels” such that light with certain wavefronts can pass through the medium with high transmission. Here we show that a scattering structure can be designed so that open channels match target input/output channels in order to maximize transmission while keeping the dispersive properties typical of diffusive media. Specifically, we use inverse design to generate a scattering structure where the open channels match the output waveguides at desired wavelengths. For a proof of concept, we propose a 1 × 10 multiplexer covering a band of 500 nm in the mid-infrared spectrum, with a footprint of only 9.4 µ m × 14.4 µ m . We also show that filters with nearly arbitrary spectral response can be designed, enabling a new degree of freedom in on-chip spectrometer design, and we investigate the ultimate resolution limits of these structures. The structures can also be designed based on a simple geometry consisting of circular holes with diameters from 200 to 700 nm etched in a dielectric slab, making them highly suited for fabrication. With the help of compressive sensing, the proposed method represents an important tool in the quest towards integrated lab-on-a-chip spectroscopy.

An amendment to this paper has been published and can be accessed via a link at the top of the paper.