Ion pumps

Audi, M.; Simon, M de

doi:10.1016/0042-207x(87)90048-0

Cited by 42 publications

(13 citation statements)

References 8 publications

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“…Indeed, I(t) has a nontrivial dependence on the pressure governed by the pressure regime the pump is working in. This fact is encoded by the empirical equation [32]…”

Section: B Practical Fitting Modelmentioning

confidence: 99%

“…This is also an expected behavior since this parameter is related to the discharge current which is depressed by the spacecharge effect when the pressure rises. As a consequence, the sputtering rate becomes reduced [32]. In fact, what happens is that at relatively high initial ion currents or pressures, the energy of the ions hitting the cathode is no longer exclusively defined by the applied voltage U .…”

Section: B Practical Fitting Modelmentioning

confidence: 99%

“…So far, SIPs are commonly used in cold atom experiments requiring UHV. Since they are an unavoidable component, which is at the same time able to provide pressure readings [32,33], it is therefore relevant to have a physical model of the observed vacuum dynamics. This dynamics is not only determined by the pumping mechanism of the SIPs but also by conductance of the whole system and the dispenser sourcing effect.…”

Section: Introductionmentioning

confidence: 99%

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Pumping Dynamics of Cold-Atom Experiments in a Single Vacuum Chamber

et al. 2019

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A nonlinear analytical model for the pressure dynamics in a vacuum chamber, pumped with a sputter ion pump (SIP), is proposed, discussed and experimentally evaluated. The model describes the physics of the pumping mechanism of SIPs in the context of a cold atom experiment. By using this model, we fit pump-down curves of our vacuum system to extract the relevant physical parameters characterizing its pressure dynamics. The aim of this investigation is the optimization of cold atom experiments in terms of reducing the dead time for quantum sensing using atom interferometry. We develop a calibration method to improve the precision in pressure measurements via the ion current in SIPs. Our method is based on a careful analysis of the gas conductance and pumping in order to reliably link the pressure readings at the SIP with the actual pressure in the vacuum (science) chamber. Our results are in agreement with the existence of essentially two pumping regimes determined by the pressure level in the system. In particular we found our results in agreement with the well known fact that for a given applied voltage, at low pressures, the discharge current efficiently sputters pumping material from the pump's electrodes. This process sets the leading pumping mechanism in this limit. At high pressures, the discharge current drops and the pumping is mainly performed by the already sputtered material.

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“…Indeed, I(t) has a nontrivial dependence on the pressure governed by the pressure regime the pump is working in. This fact is encoded by the empirical equation [32]…”

Section: B Practical Fitting Modelmentioning

confidence: 99%

Section: B Practical Fitting Modelmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Pumping Dynamics of Cold-Atom Experiments in a Single Vacuum Chamber

et al. 2019

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“…Diese [5]. edelgase werden mit 20 bis 25 % gepumpt [6]. eine edelgasinstabilität ist faktisch nicht vorhanden, sie liegt bei mehr als 70 mbar l [4].…”

Section: Eigenschaftenunclassified

Ionengetterpumpen

Thierley¹

2010

Vak Forsch Prax

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“…However, using a miniaturized magnetic ion pump, e.g., the device reported in [2], in a chip-scale atomic sensor system is not ideal for two reasons: (i) as the diameter of the pump anode scales down, the threshold magnetic field to achieve penning cell trapping increases [3], and (ii) as the size of the cell is decreased and the vacuum chamber gets spatially closer to the pump, the increased magnetic field from the ion pump will alter the quantum states of the laser-cooled atoms, leading to incorrect measurements [4]. A non-evaporable getter (NEG) pump is an alternative to maintain UHV in a small chamber; however, NEGs are not a complete solution for a chip-scale atomic sensor application because of their inability to pump efficiently alkali vapors or noble gases [5].…”

Section: Introductionmentioning

confidence: 99%

Nanostructured silicon field emitter array-based high-vacuum magnetic-less ion pump for miniaturized atomic spectroscopy sensors

Basu

Perez

Velásquez–García

2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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We report the design, fabrication, and characterization of a novel magnetic-less ion pump architecture for generation and maintenance of high vacuum in small systems that is compatible with alkali-vapor cells for lasercooled atomic sensors. The pump uses a nanostructured silicon field emitter array to generate a beam of electrons that fragments the gas molecules into ions, which are captured by a high-voltage getter. In a proof-of-concept demonstration with a 200 cm 3 vacuum chamber, pressures as low as 3.0×10 -7 Torr were generated, corresponding to a 25% decrease of the pressure inside the chamber. The field emission cathode does not degrade when operated in the presence of rubidium vapor at a pressure as high as 7×10 -6 Torr, making the pump technology compatible with laser-cooled alkali atom clocks and inertial sensors. KEYWORDSAtomic clocks, atom interferometry, electron impact ionization, field emission, MEMS/NEMS ion pump, vacuum generation.

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Ion pumps

Cited by 42 publications

References 8 publications

Pumping Dynamics of Cold-Atom Experiments in a Single Vacuum Chamber

Pumping Dynamics of Cold-Atom Experiments in a Single Vacuum Chamber

Ionengetterpumpen

Nanostructured silicon field emitter array-based high-vacuum magnetic-less ion pump for miniaturized atomic spectroscopy sensors

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