Nanostructured silicon field emitter array-based high-vacuum magnetic-less ion pump for miniaturized atomic spectroscopy sensors

Basu, Anirban; Perez, Maximillian A.; Velásquez–García, Luis Fernando

doi:10.1109/transducers.2015.7181099

Cited by 3 publications

(2 citation statements)

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“…Arrays of emitters can be implemented to increase the total emission current from the electron source provided the tip radii distribution is narrow [24]. The same field electron emitter array design used in this work has been shown to be compatible with rubidium vapor, which is an alkali metal commonly used in cold-atom interferometry [25].…”

Section: Introductionmentioning

confidence: 99%

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An electrostatic ion pump with nanostructured Si field emission electron source and Ti particle collectors for supporting an ultra-high vacuum in miniaturized atom interferometry systems

Basu

Velásquez–García

2016

J. Micromech. Microeng.

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We report a field emission-based, magnetic-less ion pump architecture for helping maintain a high vacuum within a small chamber that is compatible with miniaturized cold-atom interferometry systems. A nanostructured silicon field emitter array, with each nano-sharp tip surrounded by a self-aligned proximal gate electrode, is used to generate a surplus of electrons that cause impact ionization of gas molecules. A two-stage cylindrical electron collector, made of titanium, is used to increase the travel distance of the electrons, augmenting the ionization probability; gas ionization is subsequently followed by gettering of the ions by a negatively charged, annular-shaped titanium electrode. A proof-of-concept pump prototype was characterized using a 25 cm 3 stainless steel vacuum chamber backed up by an external turbomolecular pump, a diaphragm pump, and a standard ion pump. Pumping action was observed with the electrostatic pump operating alone after an initial rapid rise of the chamber pressure due to electron/ion scrubbing. In addition, running the electrostatic pump in combination with the standard ion pump results in a lower vacuum level compared to the vacuum level produced by the standard ion pump acting alone. A proposed reduced-order model accurately predicts the functional dependence of the pressure versus time data and provides a good estimate of the characteristic pumping time constant inferred from the experiments.

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Section: Introductionmentioning

confidence: 99%

“…In this work, pressures as low as 4.47 × 10 −9 Torr were observed in a proof-of-concept demonstration with a 25 cm 3 vacuum chamber. Earlier, our group demonstrated field emission-based pump designs using two different architectures that showed some degree of pumping [25,29].…”

Section: Introductionmentioning

confidence: 99%