Ion implantation into LiNbO3

Götz, G.; Karge, H.

doi:10.1016/0167-5087(83)90923-7

Cited by 88 publications

(21 citation statements)

References 18 publications

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“…In the initial stage, increasing temperature up to around 300 or 350°C (depending on the waveguide type) causes a clear reduction in waveguide losses. This stage is very likely related to the removal of radiation induced coloring and defects centers, in accordance with results reported in the literature for waveguides prepared by different ion implantation processes [4,[12][13][14][15][16][17]. Another source of PL is the scattering at the interface separating the guiding and barrier layers.…”

Section: Discussionsupporting

confidence: 75%

Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation

et al. 2012

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The propagation losses (PL) of lithium niobate optical planar waveguides fabricated by swift heavy-ion irradiation (SHI), an alternative to conventional ion implantation, have been investigated and optimized. For waveguide fabrication, congruently melting LiNbÜ3 substrates were irradiated with F ions at 20 MeV or 30 MeV and fluences in the range 10 13 -10 14 cm . The influence of the temperature and time of post-irradiation annealing treatments has been systematically studied. Optimum propagation losses lower than 0.5 dB/cm have been obtained for both TE and TM modes, after a two-stage annealing treatment at 350 and 375°C. Possible loss mechanisms are discussed.

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Section: Discussionsupporting

confidence: 75%

Analysis and optimization of propagation losses in LiNbO3 optical waveguides produced by swift heavy-ion irradiation

et al. 2012

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“…As far as we know, sufficient reliable data are not yet available. Swelling ratios, u N (Xcut)/u N (Zcut) = 1 − 2, were, indeed, observed in old experiments [62] on LiNbO 3 crystals irradiated with nitrogen at 150 keV, i.e. with a strong collisional contribution.…”

Section: Surface Swellingmentioning

confidence: 89%

“…generation of dislocations, as well as initiate or propagate fracture cracks. Glide deformation [62] has been observed on congruent LiNbO 3 only for temperatures around or above 1000…”

Section: Mechanical Effectsmentioning

confidence: 99%

Elastic (stress–strain) halo associated with ion-induced nano-tracks in lithium niobate: role of crystal anisotropy

Rivera¹,

Garcia²,

Olivares³

et al. 2011

J. Phys. D: Appl. Phys.

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The elastic strain/stress fields (halo) around a compressed amorphous nano-track (core) caused by a single high-energy ion impact on LiNbO 3 are calculated. A method is developed to approximately account for the effects of crystal anisotropy of LiNbO 3 (symmetry 3m) on the stress fields for tracks oriented along the crystal axes (X, Y or Z). It only considers the zero-order (axial) harmonic contribution to the displacement field in the perpendicular plane and uses effective Poisson moduli for each particular orientation. The anisotropy is relatively small; however, it accounts for some differential features obtained for irradiations along the crystallographic axes X, Y and Z. In particular, the irradiation-induced disorder (including halo) and the associated surface swelling appear to be higher for irradiations along the X-or Y -axis in comparison with those along the Z-axis. Other irradiation effects can be explained by the model, e.g. fracture patterns or the morphology of pores after chemical etching of tracks. Moreover, it offers interesting predictions on the effect of irradiation on lattice parameters.

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“…Furthermore, the chemical resistance is reduced. As a consequence the damaged regions are etched in a hydrofluoric solution (HF) without affecting the non irradiated crystal [5][6][7][8]. In combination with selective ion irradiation using standard masking technologies this allows the fabrication of high quality micro-and nano-structures with high aspect ratios and low roughness in LiNbO 3 [9,10].…”

Section: Introductionmentioning

confidence: 99%