2017
DOI: 10.1088/1361-6528/aa67c2
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Ion-damage-free planarization or shallow angle sectioning of solar cells for mapping grain orientation and nanoscale photovoltaic properties

Abstract: Ion beam milling is the most common modern method for preparing specific features for microscopic analysis, even though concomitant ion implantation and amorphization remain persistent challenges, particularly as they often modify materials properties of interest. Atomic force microscopy (AFM), on the other hand, can mechanically mill specific nanoscale regions in plan-view without chemical or high energy ion damage, due to its resolution, directionality, and fine load control. As an example, AFM-nanomilling (… Show more

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Cited by 7 publications
(6 citation statements)
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“…The thickness dependence of the local piezoresponse acquired using TAFM has been analyzed in the context of Landau–Ginzburg–Devonshire phenomenological theory, which reveals the thickness dependence of the spontaneous polarization and critical switching thickness in BiFeO 3 . Additionally, TAFM provides an experimental platform for thickness-dependent and defined-geometry experiments with site selectivity (20, 21). This capability is leveraged to perform polarization switching experiments on a programmed thickness gradient in BiFeO 3 following TAFM, and report localized, direct measurements of the electric field required for nucleation of ferroelectric domains as a function of film thickness.…”
mentioning
confidence: 99%
“…The thickness dependence of the local piezoresponse acquired using TAFM has been analyzed in the context of Landau–Ginzburg–Devonshire phenomenological theory, which reveals the thickness dependence of the spontaneous polarization and critical switching thickness in BiFeO 3 . Additionally, TAFM provides an experimental platform for thickness-dependent and defined-geometry experiments with site selectivity (20, 21). This capability is leveraged to perform polarization switching experiments on a programmed thickness gradient in BiFeO 3 following TAFM, and report localized, direct measurements of the electric field required for nucleation of ferroelectric domains as a function of film thickness.…”
mentioning
confidence: 99%
“…Specific settings include a load of ca. 1 µN, a line rate of 0.5 Hz, and a low-deflection feedback gain producing near “open loop” scanning and hence an essentially planar surface milling [ 8 ]. Approximately 15 nm in depth are practically removed per image frame, leading to effective 30 nm resolution in the z -direction between consecutive pairs of I SC * and V OC * maps throughout the polycrystalline film thickness.…”
Section: Resultsmentioning
confidence: 99%
“…Routines to test for such associations are therefore increasingly employed [ 1 , 24 ], allowing scientists to focus on or ignore such regions depending on whether they are true local variations or experimental artifacts. In any case, in order to minimize the influence of such topography, our specimens are first partially planarized [ 8 ]. This provides a surface morphology with slopes gradually transitioning ±5° over several micrometers according to the true topography [ 25 ] ( Fig.…”
Section: Resultsmentioning
confidence: 99%
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“…Atomic Force Microscopy (AFM), using a micro probe with a nano tip as force sensor and machining tool, can achieve both topography imaging and material removing [4,5]. The imaging and machining ability of AFM has been improved by various advanced methods recently [6][7][8]. Taking the advantage of high resolution, flexibility and low cost, the AFM nanomachining has been widely employed to fabricate nanostructures with sub-nanometer accuracy on various materials including ultra-thin films [9].…”
Section: Introductionmentioning
confidence: 99%