1996
DOI: 10.1063/1.363240
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Ion beam syntheses and microstructure studies of a new FeSi2 phase

Abstract: Iron-silicide has been formed by ion implantation of iron into silicon (111). In the as-implanted sample, a new type of orthorhombic FeSi2 phase was found. Although the lattice parameters of the new phase are the same as those of the known semiconductor β-FeSi2, its point group and space group were different and determined to be mmm and Pbca, respectively.

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Cited by 7 publications
(1 citation statement)
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“…There are many ways to produce β-FeSi 2 , such as ion implantation [5][6][7][8][9][10], pulsed laser deposition [11] and chemical vapour deposition [12], in which β-FeSi 2 thin film can be produced on a substrate. Ball milling is another simple and easy way.…”
Section: Introductionmentioning
confidence: 99%
“…There are many ways to produce β-FeSi 2 , such as ion implantation [5][6][7][8][9][10], pulsed laser deposition [11] and chemical vapour deposition [12], in which β-FeSi 2 thin film can be produced on a substrate. Ball milling is another simple and easy way.…”
Section: Introductionmentioning
confidence: 99%