2007
DOI: 10.1002/pssa.200622438
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Controllable growth of α‐ and β‐FeSi2 thin films on Si(100) by facing‐target sputtering

Abstract: Single‐phase β‐ and α‐FeSi2 thin films can be grown on Si(100) with and without a thin Fe buffer layer by adopting a facing target radio‐frequency magnetron sputtering method. The role of the buffer layer on the formation of β‐ and α‐FeSi2 thin film was discussed. The composition of β‐FeSi2 thin film can be tuned from Fe enrichment to Si enrichment by altering the radio‐frequency input power applied on the Si or/and Fe target, and the β‐FeSi2 thin film has a high (202)/(220) orientation. (© 2007 WILEY‐VCH Verl… Show more

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Cited by 8 publications
(5 citation statements)
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“…This process is explained based on the established literature of gold-silicon chemistry: Gold and silicon have a relatively low eutectic temperature; at higher temperature, the iron-gold mixture remains as a liquid eutectic alloy. It is reasonable to expect To the best of our knowledge, no complete experimental XRD spectrum of β-FeSi 2 nanoparticles has been presented in the literature (26,(62)(63)(64)(65)(66)(67)(68)(69)(70). When the sample is annealed at 800 °C with triethylsilane, the (023), ( 440), ( 006), (262), and (535) atomic reflections disappear (Figure 7b ii).…”
Section: Resultsmentioning
confidence: 99%
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“…This process is explained based on the established literature of gold-silicon chemistry: Gold and silicon have a relatively low eutectic temperature; at higher temperature, the iron-gold mixture remains as a liquid eutectic alloy. It is reasonable to expect To the best of our knowledge, no complete experimental XRD spectrum of β-FeSi 2 nanoparticles has been presented in the literature (26,(62)(63)(64)(65)(66)(67)(68)(69)(70). When the sample is annealed at 800 °C with triethylsilane, the (023), ( 440), ( 006), (262), and (535) atomic reflections disappear (Figure 7b ii).…”
Section: Resultsmentioning
confidence: 99%
“…However, only 11−12 XRD reflections of β-FeSi 2 are observed on silicon (111) substrate (either from core-shell or alloy nanoparticles). To the best of our knowledge, no complete experimental XRD spectrum of β-FeSi 2 nanoparticles has been presented in the literature , . When the sample is annealed at 800 °C with triethylsilane, the (023), (440), (006), (262), and (535) atomic reflections disappear (Figure b ii).…”
Section: Resultsmentioning
confidence: 99%
“…During cooling, the high temperature stable α-FeSi 2 phase transforms into the β-FeSi 2 phase in terms of an energy-lowering Jahn-Teller-like distortion, accompanied by a spontaneous metal-semiconductor transition [10][11][12]. Although the impure α phase (nonmagnetic) can only be occasionally obtained via facing-target sputtering [13], ion implantation [14], and the annealing of a few monolayer films of Fe on Si(111) [15,16] and Si(001) [17,18] substrates, it already shows interesting applications as electrodes or an interconnecting material, precursors for achieving Si-β heterostructures [15,19]. Physically, the magnetic properties of metastable phases can be drastically different from those of equilibrium phases [20,21].…”
mentioning
confidence: 99%
“…In Refs. [12], [16]- [19] a successful fabrication of thin films α−F eSi 2 was reported. Also, while the magnetic order is not observed in bulk stoichiometric disilicide α − F eSi 2 , ferromagnetism was found [19] in the metastable phase α − F eSi 2 , which was stabilized in epitaxial-film grown on the silicon substrate.…”
Section: Introductionmentioning
confidence: 99%