Iodine Doping of Amorphous Carbon Thin Films Deposited by Thermal CVD

Abstract

A simple thermal chemical vapor deposition method is employed for the deposition of amorphous carbon thin films by natural precursor camphor oil onto the glass substrates and the iodine doping process. In this work, we have studied the effect of iodine doping on the evolution of electrical properties and the optical and structural properties of amorphous carbon thin films. The amorphous carbon thin films were characterized by using Raman spectroscopy, UV-VIS-NIR spectroscopy, current-voltage (I-V) measurement, Fourier transform infrared (FTIR) and FESEM. The I-V study reveals that the electrical conductivity was increased with the iodine doping. The iodine doped thin films induced graphitization by decreasing the optical band gap. Raman and FTIR result indicates that amorphous carbon thin films consist of a mixture of sp2 and sp3 bonded carbon atoms. The FESEM shows the amorphous nature of the thin films.