Investigation of Nanoscale TiN/MoN Multilayered Systems, Fabricated Using Arc Evaporation

Abstract

Using the vacuum-arc evaporation method we fabricated periodic multilayered TiN/MoN structures with different bilayer periods λ ranging from 8 to 100 nm. We found that molybdenum nitride and titanium nitride layers grown on steel show local partial epitaxy and columnar growth across interfaces. A molybdenum-titanium carbide interlayer was evidenced between the substrate and the multilayer. Molybdenum nitride and titanium nitride layers contain small (5÷30 nm) grains and are well crystallized with (100) preferred orientation. They were identified as stoichiometric fcc TiN and cubic γ-M2N. Non-cubic molybdenum nitride phases were also detected. The hardness of the obtained structures achieved great values and maximal hardness was 31÷41.8 GPa for the multilayered structure with a 8 nm period. Hardness of the obtained coatings is 25÷45% higher in comparison with the initial single-layer nitride coatings, plasticity index of multilayered structure is 0.075.

Nanocomposite Multilayer Binary Nitride Coatings Based on Transition and Refractory Metals: Structure and Properties

“…However, the thickness of MoN layers (light colour) was slightly less than that of CrN layers (dark colour) that was confirmed by TEM studies of CrN/MoN samples with Λ = 72 nm deposited at the substrate bias of −300 V ( Figure 10). The same situation was observed in TiN/MoN multilayer coatings fabricated at U b = −40 V. Their cross section views are depicted in Figure 11, where the light lines correspond to MoN and the dark ones correspond to TiN layers [120,125]. It may be caused by different time evaporation of cathodes and deposition rates of nitride layers [126].…”

“…Structural features, physical-mechanical and tribological properties of multilayer structures can be reviewed in detail on the refractory and transition metals (Ti, Cr, Zr and Mo) based nitride coatings [2,10,29,82,108,118,119]. TiN/ZrN, TiN/MoN and CrN/MoN coatings were deposited on the steel substrates by the vacuum-arc evaporation method [8,99,100,120]. The vacuum chamber was equipped with a pressure control system and two evaporators with Ti, Cr or Mo targets.…”

“…The structure consisted of the sequence of alternating TiN and MoN layers, and the well-crystallized 100 nm thin interlayer, which contained Ti, Mo, C, and N [101]. Figure 11, where the light lines correspond to MoN and the dark ones correspond to TiN layers [120,125]. It may be caused by different time evaporation of cathodes and deposition rates of nitride layers [126].…”

The Critical Raw Materials in Cutting Tools for Machining Applications: A Review

“…Many research groups around the world have worked on this topic, and many papers have been published that review and evaluate the recent progress in this area [127,133,155,[158][159][160]. Among the most recent and interesting multilayer solutions for protective coatings there are TiN/TiAlN [161,162], TiAlN/TaN [163], Ti(Al)N/Cr(Al)N [121], (TiAlSiY)N/MoN [164], CrN/AlSiN [165], AlCrN/TiAlTaN [166], TiSiC/NiC [167], TiN/MoN [168,169], TiN/WN [170], TiN/ZrN [171], Zr/ZrN [172], Ta/TaN [173], CrN/MoN [174][175][176], (TiZrNbHfTa)N/WN [177], and multilayer hard/soft DLC coatings [178]. In particular, the following multi-layered coatings were also deposited on cemented carbide substrates or machining tool inserts, including WC-Co-based inserts, for mechanical tests in laboratories or for industrial tests: TiN/TiAlN [162], TiAlN/TiSiN [179], CrAlSiN/TiVN [180], AlCrN/TiVN [181], TiVN/TiSiN [182], CrN/CrCN [183], AlTiCrSiYN/AlTiCrN [184] TiCrAlN/TiCrAlSiYN [185].…”

Phase composition and crystallite size study of multilayered transition metal films based on molybdenum and chromium nitrides

“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19]. Hard coatings are the most efficient in providing the protection from deformation and wear [20][21][22][23][24][25][26][27][28][29][30][31][32]. But often hard materials may be brittle and prone to cracking.…”