Abstract:The paper is focused on the deposition and study of multilayered transition metal nitride films CrN/MoN obtained by vacuum arc deposition (Arc-PVD). Samples have from 12 up to 354 layers with total thickness of 8-15 μm. Bilayer thickness of samples vary in range from 2.2 μ to 40 nm. Films have been studied by scanning electron microscopy (SEM) from crosssection view. Their elemental composition also has been studied by energy-dispersive X-ray spectroscopy (EDS). Characterization of the structure of multilayere… Show more
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