2019
DOI: 10.3390/coatings9030155
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Nanocomposite Multilayer Binary Nitride Coatings Based on Transition and Refractory Metals: Structure and Properties

Abstract: One area of constant interest in many fields of industry is development of functional multilayer coatings that possess excellent performance characteristics. That is why in our brief review the results of studies of structure and properties of multilayer structures based on binary nitrides of transition or refractory metals obtained by various physical-vapor deposition (PVD) techniques are presented. The influence of substrate temperature, substrate bias voltage, bilayer thickness and interface boundaries on t… Show more

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Cited by 57 publications
(32 citation statements)
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“…MeN x films are slightly off-stoichiometric: overstoichiometric ZrN 1. 15 and AlN 1.30 films and substoichiometric CrN 0.83 films were obtained. However, the SiN x film has the Si 3 N 4 stoichiometry.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…MeN x films are slightly off-stoichiometric: overstoichiometric ZrN 1. 15 and AlN 1.30 films and substoichiometric CrN 0.83 films were obtained. However, the SiN x film has the Si 3 N 4 stoichiometry.…”
Section: Methodsmentioning
confidence: 99%
“…Multilayers based on TMN usually belong to the first category [12][13][14][15][16][17]. The comparison of hardness and other mechanical characteristics of multilayered coatings made of alternate stacking of various TMN is given in [15]. It is pointed that the TiN/VN multilayered coatings are one of the most successful examples of superhard materials.…”
Section: Introductionmentioning
confidence: 99%
“…Silicon is very often introduced in nitride coatings to form hard nanocomposite materials, where amorphous Si 3 N 4 surrounds hard metal nitride grains [125], or a similar multi-layered configuration may be applied [126]. Refractory metals (Nb, Mo, Ta, W, Re) [127] significantly improve the thermal stability of the coatings and allow them to work under extreme conditions and high speed, but most of them are CRM elements (see Figure 2).…”
Section: Multi-elemental Compounds and High-entropy Alloy Protective mentioning
confidence: 99%
“…There are several paths to their design: depositing a set of films in a special order according to their functionality (e.g., substrate > adhesion film > superhard film > oxidation resistant film), alternating films with a similar crystal lattice for epitaxial growth, hard crystalline films with thin amorphous layers, alternating TMN, TMC or TMB films, nanocomposites, HEAs coatings, etc. Many research groups around the world have worked on this topic, and many papers have been published that review and evaluate the recent progress in this area [127,133,155,[158][159][160]. Among the most recent and interesting multilayer solutions for protective coatings there are TiN/TiAlN [161,162], TiAlN/TaN [163], Ti(Al)N/Cr(Al)N [121], (TiAlSiY)N/MoN [164], CrN/AlSiN [165], AlCrN/TiAlTaN [166], TiSiC/NiC [167], TiN/MoN [168,169], TiN/WN [170], TiN/ZrN [171], Zr/ZrN [172], Ta/TaN [173], CrN/MoN [174][175][176], (TiZrNbHfTa)N/WN [177], and multilayer hard/soft DLC coatings [178].…”
Section: Multi-layered and Graded Coatingsmentioning
confidence: 99%
“…The previous studies have been focused upon a few known key findings in the field of multilayered films such as (i) super hardness resulted from the internal fine-grain strengthening and blocking effect of interface to dislocation; (ii) corrosion resistance improved by reducing the porousness of a variety of alternating sublayers; and (iii) enhanced wear performance due to the existence of massive interfacial structures [26][27][28]. Therefore, the synthesis of polynary nitrogen-based composite coatings can ensure not only comprehensive implementation of above-mentioned advantages, but also attached the coatings self-lubricated features via an introduction of Mo into the coatings' structure.…”
Section: Introductionmentioning
confidence: 99%