Intrinsic hydrogenated amorphous silicon (a-Si:H) film has been demonstrated to hydrogenate dangling bonds on the surface of crystalline silicon (c-Si), which reduces the interface defect density, thus enabling an outstanding passivation effect [1-3]. However, like many other industrial c-Si solar cells that suffer from light-induced degradation and light and elevated temperature induced degradation (LeTID) [4,5], the decay of electrical properties has also been found in thin-film a-Si:H solar cells [6][7][8], as well as samples of c-Si coated with intrinsic a-Si:H films after light soaking [9]. A significant observation reported by Plagwitz et al. [10] suggested that illumination induced an increase in surface recombination velocities for both a-Si:H coated p-type and n-type c-Si substrates. The degradation of performance is generally attributed to the generation of deeplevel defects acting as recombination centers, most likely as single dangling bonds [11,12], which is considered to be related to the Staebler-Wronski effect (SWE) [13].However, when a-Si:H film is doped and overlays with another thin intrinsic a-Si:H film (Fig. S1), the functionality of silicon heterojunction (SHJ) cells can be further increased because of the carrier selectivity possessed by the n-type and ptype a-Si:H overlayers, which efficiently help to collect electrons and holes, respectively [14,15]. Such a structure of c-Si coated with doped/intrinsic a-Si:H bilayers is the key component of SHJ solar cells. Compared with the high fabrication temperature of conventional c-Si solar cells (up to 900°C), SHJ solar cells usually require a relatively low processing temperature (<200°C) when a-Si:H is deposited using plasma-enhanced chemical vapor deposition (PECVD) [16,17]. Due to the simple and low-cost manufacturing process, as well as its excellent passivation effect, the a-Si:H film has been widely used in SHJ solar cells. Tanaka et al. [17] proposed the p-a-Si:H/n-c-Si heterojunction structure with a thin intrinsic a-Si:H layer inserted in between, which achieved an efficiency (η) of 18.1% in 1992. Recently, Sai et al. [18] improved the open-circuit voltage (V OC ) of SHJ solar cells to 754 mV, and LONGi solar reported an η of 26.3% in 2021 (https://www.longi.com/cn/news/7093/).It is essential for solar cells to maintain their excellent properties during long periods of light soaking, which occurs in a normal working environment. Thus, understanding the longterm stability of SHJ solar cells is imperative. To date, several studies [19][20][21] have been conducted to investigate the stability