2008
DOI: 10.1109/tnano.2008.2004771
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Investigation of Coulomb Mobility in Nanoscale Strained PMOSFETs

Abstract: This paper provides an experimental assessment of Coulomb scattering mobility for advanced strained devices. By accurate short-channel mobility extraction, we examine the impact of process-induced uniaxial strain on Coulomb mobility in shortchannel pMOSFETs. Our extracted Coulomb mobility shows very weak stress dependency at room temperature. This finding has also been verified in both long-and short-channel devices by the fourpoint wafer bending measurement. Therefore, in order to maximize the process-induced… Show more

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Cited by 9 publications
(1 citation statement)
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“…5 that µ eff increases with V g in the low |V gst | regime. This is because in the low |V gst | regime, the mobility is mainly determined by Coulombic scattering [20]. The mobile carrier screening makes µ eff increases with V g .…”
Section: Devices and Measurementmentioning
confidence: 99%
“…5 that µ eff increases with V g in the low |V gst | regime. This is because in the low |V gst | regime, the mobility is mainly determined by Coulombic scattering [20]. The mobile carrier screening makes µ eff increases with V g .…”
Section: Devices and Measurementmentioning
confidence: 99%