2002
DOI: 10.1081/amp-120002796
|View full text |Cite
|
Sign up to set email alerts
|

Investigation into polishing process of CVD diamond films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

0
3
0

Year Published

2005
2005
2021
2021

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 9 publications
(5 citation statements)
references
References 4 publications
0
3
0
Order By: Relevance
“…Except working medium, the electric parameter such as working current, pulse duration and so forth, has influence on the surface integrity. Therefore, an orthogonal design for multi-factor experiments is employed to select the proper machining parameters [8,9].…”
Section: Methodsmentioning
confidence: 99%
“…Except working medium, the electric parameter such as working current, pulse duration and so forth, has influence on the surface integrity. Therefore, an orthogonal design for multi-factor experiments is employed to select the proper machining parameters [8,9].…”
Section: Methodsmentioning
confidence: 99%
“…The EDM process has been used in cutting electrically conductive materials and then PCDs [1,76]. Guo et al [77,78] and Lu et al [79] introduced this process to polish CVD diamond films. A thin layer of electrically conductive material is needed before polishing for a dielectrically conductive CVD film.…”
Section: Electrical Discharge Machining (Edm)mentioning
confidence: 99%
“…The proposed methods include the lapping, grinding [1], coupled-abrading [2] and thermochemical polishing assisted by metal powder [3] such as rare-earth [4] and manganese powder [5]. The high energy beam such as laser [6], ion beam [7], abrasive water jet [8] and electrical discharge [9,10] were also used to polish diamond films. In recent years, chemical/ mechanical polishing has been regarded as a promising method [11].…”
Section: Introductionmentioning
confidence: 99%