“…42 These dislocations would lead to a nonuniform diffusion of nitrogen and Ga plasma on the interface during the further growth, and eventually result in the formation of an interfacial layer. 44,45 In our case, the lattice and CTE mismatches between AlN and GaN at a higher growth temperature of 750 °C are much smaller than the ones at a lower growth temperature of 550 °C, 31,50,51 which results in the formation of less stressed GaN films at the higher growth temperature of 750 °C, as the GaN films tend towards a uniform growth and lead to the absence of the interfacial layer. 44,52,53 The epitaxial growth relationship between AlN and GaN of AlN This journal is © The Royal Society of Chemistry 2014 alignment of GaN [11−20]//AlN [11−20]//Cu [1−10] could also be obtained, as shown in Fig.…”