Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy

Shinohara, Masanori; Cho, Ken; Shibata, Hiromichi; Okamoto, Keishi; Nakatani, Tatsuyuki; Matsuda, Yoshinobu

doi:10.1016/j.tsf.2007.10.014

Cited by 17 publications

(14 citation statements)

References 13 publications

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“…This, in turn, influences the physical and chemical properties of the films. It was shown that the hydrogen ions and radicals stabilize sp 3 C-C bonding [7]. Specifically, hydrogen ion etches the amorphous carbon more efficiently compared to hydrogen radicals.…”

Section: Introductionmentioning

confidence: 99%

Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

Polaki

Kumar

Krishna

et al. 2015

Tribology International

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Section: Introductionmentioning

confidence: 99%

Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

Polaki

Kumar

Krishna

et al. 2015

Tribology International

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“…However, the transformation into the sp 3 -CH 1-2 components would be suppressed. According to our previous report [4], the hydrogen ions physically etch the film; especially the polymer-like sp 3 -CH x was easily etched. Thereby, the sp 3 -CH x components would be preferentially etched by the hydrogen ions in this process.…”

Section: Resultsmentioning

confidence: 90%

“…The details of mechanisms, especially the chemical states during growth, have not yet been entirely understood. We have used infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS) to investigate the adsorption process of the hydrocarbon species generated in methane plasma [3][4][5].…”

mentioning

confidence: 99%

Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy

Shinohara

Kawazoe

Kawakami

et al. 2010

Trans. Mat. Res. Soc. Japan

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Substrate bias effects on deposition process of amorphous carbon film during acetylene plasma were investigated by using infrared absorption spectroscopy in multiple internal reflection geometry (MIR-IRAS). IRAS spectra showed that the relative density of sp 3-hydrocarbon was decreased with substrate bias while that of the sp 2-C and that of sp-CH were increased. Furthermore, the film was formed with the transformation of the adsorbed species generated in acetylene plasma. It suggested that owing to substrate bias, the polymer components were etched and the density of carbon-carbon bonds was increased during deposition.

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“…Appropriate monomers can form SAMs on a Si surface by siloxane (Si-O) bonds [21]. This advantage is particularly beneficial for us, because we have developed "infrared absorption spectroscopy in multiple internal reflection geometry" (MIR-IRAS) using MIR prism made from a Si wafer [30][31][32][33][34]. The study investigates the reaction of atmosphericair plasma with the abovementioned SAM using MIR-IRAS.…”

Section: Introductionmentioning

confidence: 99%

Infrared Absorption Spectroscopic Study on Reaction between Self-Assembled Monolayers and Atmospheric-Pressure Plasma

Shinohara

Amano

Maruno

et al. 2015

Journal of Spectroscopy

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Plasma is becoming increasingly adopted in bioapplications such as plasma medicine and agriculture. This study investigates the interaction between plasma and molecules in living tissues, focusing on plasma-protein interactions. To this end, the reaction of air-pressure air plasma with NH2-terminated self-assembled monolayer is investigated by infrared spectroscopy in multiple internal reflection geometry. The atmospheric-pressure plasma decomposed the NH2components, the characteristic units of proteins. The decomposition is attributed to water clusters generated in the plasma, indicating that protein decomposition by plasma requires humid air.

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Interaction between hydrogen plasma and hydrogenated amorphous carbon film, investigated by infrared spectroscopy

Cited by 17 publications

References 13 publications

Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

Substrate Bias Effects on Amorphous Carbon Film Deposition Process during Acetylene Plasma, Investigated with Infrared Spectroscopy

Infrared Absorption Spectroscopic Study on Reaction between Self-Assembled Monolayers and Atmospheric-Pressure Plasma

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