2015
DOI: 10.1016/j.triboint.2014.09.009
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Tribological properties of chemically modified diamond like carbon films in hydrogen plasma

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Cited by 26 publications
(21 citation statements)
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“…Conversely, the H 2 /Ar plasma is reported to lead to the highest decrease in sp 2 bonds with increasing treatment time while the sp 3 structure is less affected when compared to the O 2 /Ar series, as shown in S6a,b. This result is consistent with the studies carried out on diamond-like carbon (DLC) where the H 2 plasma exposure of thin films has been shown to etch away unsaturated bonds while increasing the sp 3 content 54 .…”
Section: Resultssupporting
confidence: 91%
See 1 more Smart Citation
“…Conversely, the H 2 /Ar plasma is reported to lead to the highest decrease in sp 2 bonds with increasing treatment time while the sp 3 structure is less affected when compared to the O 2 /Ar series, as shown in S6a,b. This result is consistent with the studies carried out on diamond-like carbon (DLC) where the H 2 plasma exposure of thin films has been shown to etch away unsaturated bonds while increasing the sp 3 content 54 .…”
Section: Resultssupporting
confidence: 91%
“…Carboxylic groups were found more predominantly with the H 2 /Ar treatments plateauing at 6.9% while the O 2 /Ar treatment clearly shows a surface saturation, plateauing at 5.2% after a short exposure of 2 min to the plasma environment. Interestingly, the H 2 /Ar gas also shows the most significant drop in sp 2 carbon, down to an absolute minimum of 45.8% which can be correlated either to reduction reactions between the hydrogen radicals 56 or to the breakage of C=C bonds by the H + ions 54 57 or H radicals which, conversely, stabilizes the sp 3 C-C content. These results match previous studies where H 2 plasma treatments were found to drastically reduce the electrical conductance upon treatment, with the loss of C=C bonds 56 58 .…”
Section: Resultsmentioning
confidence: 97%
“…Thus it can be supposed that as deposited DLC:Cu film is coated by adsorbed oxygen due to air exposure [42,43]. In situ ion beam etching of DLC:Cu film results in significant shift of the O1s XPS peak maximum and change of the peak shape.…”
Section: Structure and Compositionmentioning
confidence: 99%
“…These systems need to operate in dry condition, solely relying on the surface durability of the components. In this regard, hard materials such as diamondlike-carbon (DLC), SiC, and W have been utilized with limited success as protective coatings for micro-electro-mechanicalsystems (MEMS) and micro-molds [1][2][3]. Though high hardness is effective to battle abrasive interaction, it is not the primary parameter related to adhesion, which is another important mechanism of wear [4,5].…”
Section: Introductionmentioning
confidence: 99%