Integration of suspended carbon nanotubes into micro-fabricated devices

Abstract

The integration of suspended carbon nanotubes into micron-scale silicon-based devices offers many exciting advantages in the realm of nano-scale sensing and micro-and nano-electromechanical systems (MEMS and NEMS). To realize such devices, simple fabrication schemes are needed. Here we present a new method to integrate carbon nanotubes into silicon-based devices by applying conventional micro-fabrication methods combined with a guided chemical vapor deposition growth of single-wall carbon nanotubes. The described procedure yields clean, long, taut and well-positioned tubes in electrical contact to conducting electrodes. The positioning, alignment and tautness of the tubes are all controlled by the structural and chemical features of the micro-fabricated substrate. As the approach described consists of common micro-fabrication and chemical vapor deposition growth procedures, it offers a viable route toward MEMS-NEMS integration and commercial utilization of carbon nanotubes as nano-electromechanical transducers.

Electrostatic capacitance and Faraday cage behavior of carbon nanotube forests

“…4 Recent studies have demonstrated the integration of individual CNTs 5 and CNT forests into MEMS devices. However, contrary to the challenging integration process of individual CNTs, [5][6][7] thin film catalysts to grow CNT forests can be placed in a reliable lithographically based process. As a result, CNT forests can be produced on silicon and other high-temperature substrates, 8,9 non-horizontal surfaces, 4 and can be coated or infiltrated with other materials to form microstructured composites.…”

A MEMS nano-extensometer with integrated de-amplification mechanism

“…Notice that at the end of the fabrication process, TiN rings remain on the mounting stage, potentially enabling electrical contact with the nanostructure. We note that the presented process is compatible with the integration process of SWCNT with silicon structures developed by us (Karp et al 2009). …”

“…However, mounting of different types of a specimens is possible. Several approaches for mounting of specimens were presented in the literature (Franklin et al 2002;Jungen et al 2007a, b;Jonnalogadda et al 2010;Karp et al 2009;Kawano et al 2006;Naraghi et al 2007;Ozkan et al 2010;Stampfer et al 2006).…”

“…In order to demonstrate the feasibility of the device in characterizing the behavior of stretched nano specimens, we present in this section the experimental data of stretched SWCNTs which were mounted on the device under consideration. The integration of the SWCNTs on the device was carried out in a process similar to the process that was reported by Karp et al 2009. This process enables the integration of a single or few selfassembled taut SWCNTs into silicon structures.…”

Carbon nanotube integration into MEMS devices

“…1 Introduction Since the discovery of carbon nanotubes (CNTs) substantial effort was devoted to devise methods to integrate CNTs into microdevices, in particular into microelectro mechanical system (MEMS) [1][2][3]. The integration of CNTs into microdevices offers many exciting opportunities in a wide range of applications ranging from electron-emitters [4], pressure sensors [5], sensitive accelerometers to neuronal electrodes [6,7].…”