2010
DOI: 10.1002/pssb.201000109
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Carbon nanotube integration into MEMS devices

Abstract: Phone: þ972 3 6407698, Fax: þ972 3 6423508After two decades of extensive investigation into the unique properties of carbon nanotubes (CNTs), the focus is now shifting toward the utilization of CNTs in real applications. Of particular interest is the use of CNTs in microtechnologies. To this end, CNT integration methods have to be optimized to guarantee yield, low-cost, and high performances. Here we describe three general schemes which we developed over the past several years which facilitate the direct integ… Show more

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Cited by 13 publications
(9 citation statements)
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“…Flexible devices were realized by transferring high density MWCNT films onto a flexible PDMS film (Hanein, 2010). A deliberate poor adhesion between the CNT film and the substrate allowed the transfer of the CNTs to the PDMS substrate (Figure 6A).…”
Section: Carbon Nanotubes For Electrical Neuronal Interfacingmentioning
confidence: 99%
“…Flexible devices were realized by transferring high density MWCNT films onto a flexible PDMS film (Hanein, 2010). A deliberate poor adhesion between the CNT film and the substrate allowed the transfer of the CNTs to the PDMS substrate (Figure 6A).…”
Section: Carbon Nanotubes For Electrical Neuronal Interfacingmentioning
confidence: 99%
“…Nevertheless, the simple fabrication of low-impedance and high-spatial-resolution electrodes still remains an experimental challenge. Attempts to lower the impedance, including the use of advanced interface materials [16][17][18] and patterning of metal electrodes [19][20][21][22], have led to promising results. However, they often require sophisticated techniques of production or lack mechanical stability and longevity.…”
Section: Introductionmentioning
confidence: 99%
“…For instance, carbon nanotube electrodes can be integrated into a PDMS layer by the iMP technique. 40 Deformable micro-electrode arrays on a PDMS layer have also been proposed. [41][42][43] By integrating such micro-electrodes into axon guiding tracks with high confinement efficiency, iMP could thus improve the specificity and efficiency of addressing in microelectrode array (MEA) devices.…”
Section: Discussionmentioning
confidence: 99%