The integration of suspended carbon nanotubes into micron-scale silicon-based devices offers many exciting advantages in the realm of nano-scale sensing and micro-and nano-electromechanical systems (MEMS and NEMS). To realize such devices, simple fabrication schemes are needed. Here we present a new method to integrate carbon nanotubes into silicon-based devices by applying conventional micro-fabrication methods combined with a guided chemical vapor deposition growth of single-wall carbon nanotubes. The described procedure yields clean, long, taut and well-positioned tubes in electrical contact to conducting electrodes. The positioning, alignment and tautness of the tubes are all controlled by the structural and chemical features of the micro-fabricated substrate. As the approach described consists of common micro-fabrication and chemical vapor deposition growth procedures, it offers a viable route toward MEMS-NEMS integration and commercial utilization of carbon nanotubes as nano-electromechanical transducers.

In this work we present an experimental study of the electromechanical behavior of suspended, taut, single walled carbon nanotubes (SWCNTs). A novel top-down fabrication process was developed in order to integrate the suspended SWCNTs into silicon MEMS structures fabricated using conventional micro-machining techniques. The resonant response of suspended SWCNTs under a time-varying electric field was analyzed and resonant frequencies in MHz range were registered. In addition, the electromechanical characterization of metalliclike, small band-gap-like and semiconductor-like SWCNTs under steady electric fields of varying strength was carried out and high sensitivity of SWCNTs to the gate voltage was observed. The experimental results demonstrate feasibility of the adopted fabrication framework and provide an additional insight into the complex behavior of taut, suspended SWCNT.Index Terms -Carbon nanotubes, electromechanical behavior, micro-fabrication, resonant operation, single walled carbon nanotubes.

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