2018
DOI: 10.1364/ome.8.000648
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Integrating two-temperature and classical heat accumulation models to predict femtosecond laser processing of silicon

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Cited by 53 publications
(27 citation statements)
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“…The successful application of DHTSM [47][48][49][50][51][52] also indicates that the effect of the hyperbolic effect or relaxation time cannot be ignored, especially when the laser pulse time is comparable to or shorter than the electron relaxation time [49]. At the same time, the method of simulating the interaction between laser and material by coupling the TTM with other methods has also been developed, such as the coupling of TTM and molecular dynamics method (TTM-MD) [53][54][55][56], the coupling of TTM and hydrodynamic model (TTM-HD) [57,58], and the coupling of TTM and classical heat accumulation model [59]. Despite this, the limited validity of the TTM still exists [60][61][62][63], one of which is that the validity verification at higher laser fluence is still problematic [63].…”
Section: Introductionmentioning
confidence: 99%
“…The successful application of DHTSM [47][48][49][50][51][52] also indicates that the effect of the hyperbolic effect or relaxation time cannot be ignored, especially when the laser pulse time is comparable to or shorter than the electron relaxation time [49]. At the same time, the method of simulating the interaction between laser and material by coupling the TTM with other methods has also been developed, such as the coupling of TTM and molecular dynamics method (TTM-MD) [53][54][55][56], the coupling of TTM and hydrodynamic model (TTM-HD) [57,58], and the coupling of TTM and classical heat accumulation model [59]. Despite this, the limited validity of the TTM still exists [60][61][62][63], one of which is that the validity verification at higher laser fluence is still problematic [63].…”
Section: Introductionmentioning
confidence: 99%
“…For a single scan ( n = 1), a rather flat morphology with randomly distributed small particles is observed. The absence of any of the typical self-organized structures (ripples, grooves and spikes) can be understood by the extreme situation of a very slow speed ( V = 0.002 m/s) and high repetition rate, leading to high heat accumulation [ 32 33 ]. Rescanning the sample area n times while maintaining a constant total number of pulses N eff_3D , leads to the formation of tiny cone-like structures of increasing diameter with the number of rescans.…”
Section: Resultsmentioning
confidence: 99%
“…It is worth pointing out that one possible additional reason for the pronounced differences in the CA for a given fluence is the different heat accumulation generated in the material during laser processing. As indicated in Table 1 , the use of a constant N eff_3D leads to different scan speeds and thus different heat accumulation [ 33 , 47 ].…”
Section: Resultsmentioning
confidence: 99%
“…where the laser heat addition (Q laser ¼ q in bA) is applied to the rst node as in the CW laser simulation but considered only in T e analysis. 58,85 At the wavelength of the FS laser (1030 nm), b has been reported to be 0.06. 81 During a pulse with 300 fs duration, we assume a constant laser heat ux, q in ¼ 1.77 Â 10 17 W m À2 (ESI Sec.…”
Section: Two-temperature Modelmentioning
confidence: 99%