2006
DOI: 10.1109/led.2005.862693
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Integrated thermal-fluidic I/O interconnects for an on-chip microchannel heat sink

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Cited by 59 publications
(26 citation statements)
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“…Although it is possible to introduce coolants within a thick 3D structure to handle very high power levels [35], such an approach is complex and requires thick cooling structures within the stack to bring in a sufficient fluid volume. Thus every effort should be made to remove heat from the back of a chip stack as is currently done for single high-power chips.…”
Section: Thermal Management and Effective Cooling Challengesmentioning
confidence: 99%
“…Although it is possible to introduce coolants within a thick 3D structure to handle very high power levels [35], such an approach is complex and requires thick cooling structures within the stack to bring in a sufficient fluid volume. Thus every effort should be made to remove heat from the back of a chip stack as is currently done for single high-power chips.…”
Section: Thermal Management and Effective Cooling Challengesmentioning
confidence: 99%
“…The fluidic I/Os are implemented using surface-normal hollow-core polymer pins, or micropipes [28,29]. Unlike prior work on microfluidic cooling of ICs that require millimeter-sized and bulky fluidic inlets/outlets to the microchannel heat sink, the micropipe I/Os under consideration are microscale, wafer-level batch fabricated, area-array distributed, flip-chip compatible, and mechanically compliant.…”
Section: Novel Silicon Ancillary Technologiesmentioning
confidence: 99%
“…In this case, the use of thermal vias to ensure adequate conductivity between the layers may need to be investigated. Since these cooling issues could place a significant design restriction on the types of systems that can be realized in a stacked configuration, conventional 2D cooling solutions will ultimately need to be replaced by 3D cooling solutions [32][33][34]. Such techniques that have been investigated in the literature include double-sided heat sinks, microchannels for fluidic cooling, and interleaved 3D heat-sink geometries.…”
Section: Challenges and Limitations For 3d Integrationmentioning
confidence: 99%