Integrated silicon magnetic-field sensors

Physical and Modelling Concepts of Galvanomagnetic Effects in Bipolar Semiconductor Structures

“…Ïðè öüîìó ìàãí³òíå ïîëå íå âïëèâຠíà ðîçïî-ä³ë êîíöåíòðàö³¿ [11], â çâÿçêó ç ÷èì ìàãí³òíà ³íäóêö³ÿ ï³äëÿãຠâèêëþ÷åííþ ç ôóíêö³¿ ðîç-ïîä³ëó êîíöåíòðàö³¿ â (1), (2). Òîä³ âèðàç (1) ïîòð³áíî ïåðåïèñàòè ó âèãëÿä³…”

“…Òàê, íàïðèêëàä, ³ñíóº íåâèçíà÷å-í³ñòü â ïèòàíí³ ïðî äîì³íóþ÷èé åôåêò â ñòðóê-òóðàõ ç ïîïåðå÷íîþ â³ññþ: ìàþòñÿ âàãîì³ äî-âîäè íà êîðèñòü ÿê åôåêòó â³äõèëåííÿ [21], òàê ³ ìîäóëÿö³¿ ³íaeåêö³¿ [22]. ×óòëèâ³ñòü îäí³º¿ é ò³º¿ ae ñòðóêòóðè ç ïîçäîâaeíüîþ â³ññþ [23] ïî-âÿçóºòüñÿ â [1] ç ìîäóëÿö³ºþ êîåô³ö³ºíòó ïåðå-äà÷³, â [2] ç åôåêòîì â³äõèëåííÿ, òîä³ ÿê ñàì³ àâòîðè [23] ðîçãëÿäàþòü ¿¿ ÿê ïðîÿâëåííÿ ìàã-í³òîêîíöåíòðàö³éíîãî åôåêòó.…”

Lateral and Vertical Hall Microsystems

“…In particular, because of IC technology, integrated magnetic field sensors have been boosted to the highest reliability at minimum cost. Excellent reviews on silicon magnetic sensors have been published [18,[23][24][25][26][27][28].…”

“…An introduction to general semiconductor physics is given in, eg, [29,30], and details of semiconductor devices are treated in [31,32]. Particular topics on Hall devices can be found in [23][24][25][26][27][28]. This chapter will focus on selected aspects relevant to the implementation of CMOS Hall devices.…”

“…The above considerations yield only a phenomenological description of the Hall effect. A more detailed analysis on Hall devices can be found in [23][24][25][26][27][28].…”