Integrated Planar 6-DOF Nanopositioning System

Gorges, Stephan; Hesse, Steffen; Schäffel, Christoph; Ortlepp, Ingo; Manske, Eberhard; Langlotz, Enrico; Dontsov, Denis

doi:10.1016/j.ifacol.2019.11.693

Cited by 10 publications

(2 citation statements)

References 6 publications

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“…The comparison of the two AFM images with structure heights of 0.75 nm with the table switched on and off has shown that the noise of the table in the z direction has a minor influence on the AFM measurements. Nevertheless, this can be optimised in the future by additional adaptive control [32] with the use of a third axis [33].…”

Section: Discussionmentioning

confidence: 99%

Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm

et al. 2022

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This work deals with various investigations into the accuracy of a newly developed planar nanopositioning machine. This machine, called Nanofabrication Machine 100 (NFM-100), has a positioning range of 100 mm in diameter. To determine the precision, various movement scenarios are performed with the machine table, and the trajectory deviation from the set trajectory is determined. In particular, the focus is on high velocities of up to 20 mm/s. Even at high speeds in the range of several millimetres per second, this machine can impress with its performance and only has a deviation in the nanometre range.

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Section: Discussionmentioning

confidence: 99%

Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm

et al. 2022

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“…The use of different tools for a combined structuring of the sample is possible with an appropriate tool changing system with high reproducibility, for which initial approaches already exist [59,60]. The presented approach could also be applied to positioning systems with even larger travel ranges and 6D capabilities as are currently in development [61]. These can extend the scope of application for alignment problems or macroscopicly 3Dshaped surfaces.…”

Section: Discussionmentioning

confidence: 99%

Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)

Stauffenberg,

Belkner,

Dontsov

et al. 2024

Meas. Sci. Technol.

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This paper explores large area application of tip-based nanofabrication by field emission scanning probe lithography and showcases the simultaneous possibility of atomic force microscopy on macroscopic scales. This is made possible by the combination of tip-based technology and a planar nanopositioning and nanomeasuring machine. Using long range atomic force microscopy measurement of regular grating structures, the performance of the machine is thoroughly characterized over the full 100 mm range of motion of the positioning machine, which was confirmed by repeated measurements. After initially focussing on achieving the minimum line width of < 40 nm in microscopic areas, a grating with a pitch of 1 μm is additionally fabricated over a total length of 10 mm, whereby the dimensions and deviations are also considered.

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Sub-nanometer Displacement Measurement Using Heterodyne Interferometer and Down-Beat Frequency Technique

Dong

Tai

Hoang

et al. 2022

The AUN/SEED-Net Joint Regional Conference in Transportation, Energy, and Mechanical Manufacturing Engineering

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Integrated Planar 6-DOF Nanopositioning System

Cited by 10 publications

References 6 publications

Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm

Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm

Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)

Sub-nanometer Displacement Measurement Using Heterodyne Interferometer and Down-Beat Frequency Technique

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