2011
DOI: 10.1109/led.2010.2098015
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Integrated MOSFET-Embedded-Cantilever-Based Biosensor Characteristic for Detection of Anthrax Simulant

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Cited by 20 publications
(12 citation statements)
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“…This system can be miniaturized so as to be potentially portable for point-of-care or personal diagnosis [18,19]. In addition to these methods, two free-standing piezoresistive microcantilevers of reference and sensing structures integrated with Wheatstone bridge electrical circuitry are commonly used for thermally insensitive configuration [3,20], while another method using electrical transduction by a field-effect transistor based on a silicon-on-insulator (SOI) substrate [21,22] is still under development, although it is expected to be potentially costly. In biosensing applications, the conventional dual-beam, free-standing microcantilever configuration has been extensively used for the detection of chemical interaction and biomolecular recognition in liquid environments.…”
Section: Introductionmentioning
confidence: 99%
“…This system can be miniaturized so as to be potentially portable for point-of-care or personal diagnosis [18,19]. In addition to these methods, two free-standing piezoresistive microcantilevers of reference and sensing structures integrated with Wheatstone bridge electrical circuitry are commonly used for thermally insensitive configuration [3,20], while another method using electrical transduction by a field-effect transistor based on a silicon-on-insulator (SOI) substrate [21,22] is still under development, although it is expected to be potentially costly. In biosensing applications, the conventional dual-beam, free-standing microcantilever configuration has been extensively used for the detection of chemical interaction and biomolecular recognition in liquid environments.…”
Section: Introductionmentioning
confidence: 99%
“…Anthrax simulants attached to the chemically treated gold-coated cantilever cause changes in the MOSFET drain current due to the bending of the cantilever which indicates the detection of anthrax simulant. Electrical properties of the anthrax stimulant are also responsible for the change in the drain current [15].Carbon monoxide detection is required for various healthcare, environmental, and engineering applications, SU-8 microcantilever has been used as a CO sensor. The cantilever based sensor has exhibited a fast response and recovery times and is fully recoverable after repeated exposures.…”
Section: Biodetection Applications Of Microcantilever Based Biosementioning
confidence: 99%
“…In this respect, Dravid et al . reported pioneer work on metal oxide semiconductor field effect transistor (MOSFET) embedded Si cantilever for biological sensing applications111213. Recently, piezotransistive transduction using AlGaN/GaN heterojunctions field effect transistor integrated onto a GaN micro-cantilever has been reported with an ultra-high relative electro-mechanical sensitivity of 8,700.…”
mentioning
confidence: 99%
“…This advanced electro-mechanical transduction allows the detection of nanogram-level explosives with high specificity using a novel surface-based photoacoustic spectroscopy technique14. To date, efficient transistor embedded MEMS have been mainly reported for devices based on inorganic materials11121314 since micromachining of advanced polymeric MEMS remains a challenge15. However, the development of cutting edge electro-mechanical transduction scheme combining the attractive features of polymers in terms of cost effectiveness, sensitivity and biocompatibility could play an important role in driving new applications.…”
mentioning
confidence: 99%
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