Integrated fabrication of polysilicon mechanisms

Mehregany, Mehran; Gabriel, K.J.; Trimmer, William S.

doi:10.1109/16.2522

Cited by 213 publications

(44 citation statements)

References 8 publications

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“…One of the fnst experiments to show wear as a dominant failure mechanism was performed by Gabriel et al [56]. They ran polysilicon microturbines [57] and gears at rotational speeds up to 600,000 rpm. A focused air jet directed at the turbine induced the rotation.…”

Section: Introductionmentioning

confidence: 99%

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

Tanner¹,

Smith²,

Irwin³

et al. 2000

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Section: Introductionmentioning

confidence: 99%

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes

Tanner¹,

Smith²,

Irwin³

et al. 2000

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“…Several different bearing and support structures were demonstrated for use in micromachines based on two categories: contact-type and noncontact-type. Previous contact-type bearings, like center-pin bearing with sliding bushings as support in the early polysilicon surface-micromachined micromotors [7], [8] suffered drastically from friction and wear. The friction and wear problems were less in wobble [9] and conical [10] micromotors, however, with a downfall in rotation speed.…”

mentioning

confidence: 99%

Characterization of Dynamic Friction in MEMS-Based Microball Bearings

Lin

Modafe

Shapiro

et al. 2004

IEEE Trans. Instrum. Meas.

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ISR develops, applies and teaches advanced methodologies of design and analysis toAbstract-Rolling element bearing is a well-known concept in macroscale machinery applications. They are prospective candidates for friction reduction in microelectromechanical system (MEMS), as well as for providing stable, robust support for moving micromechanisms. The characteristics of rolling element bearings need to be investigated to facilitate their applications in MEMS. It is well understood that the measured data on the macroscale cannot be directly applied to the microscale. This paper presents an in-situ noncontact experimental system to characterize the friction behavior of microball bearings on the microscale. The methodology presented in this paper provides a useful template to study the dynamical behavior of linear microball bearings with a variety of materials, geometries, and surface qualities. The system, actuated by a motor, affords wide ranges of motion for measuring the dynamic friction using a vision system. It allows the determination of the coefficient of friction (COF) without any interference due to the measurement system. With careful optimization, the error in measurement has been reduced to 2%. Different designs of microball bearings are proposed to achieve lower friction. The studied microball bearings demonstrated an average static COF of 0.01 and an average dynamic COF of 0.007 between stainless-steel and silicon-micromachined contacting surfaces at 27 C and 40% relative humidity.Index Terms-Microelectromechanical systems (MEMS), microball bearings, rolling friction, silicon micromachining, V-grooves.

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“…The complexity of the surface-micromachining process can be quantified by the number of structural and sacrificial materials. With two structural polysilicon layers, freemoving mechanical gears, springs, and sliders have been demonstrated [17], [18]. Micromotors [19], [20] and other microactuators were later demonstrated using similar fabrication processes.…”

Section: B Surface Micromachiningmentioning

confidence: 99%