Micromachining for optical and optoelectronic systems

Wu, M.C.

doi:10.1109/5.649660

Cited by 246 publications

(102 citation statements)

References 102 publications

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“…Progress in micro-electromechanical systems (MEMS) technology helped the miniaturization and realization of complex optical components such as lenses, mirrors, filters, beam splitters, and gratings on chip, and these elements are commonly labelled to as microopto-electromechanical systems (MOEMS) [1]. The emergence of SOI wafer batch processing technology has accelerated the development of high performance and reliable passive components including low-loss waveguides, power splitters and multiplexers [2,3].…”

Section: Introductionmentioning

confidence: 99%

Rotational MEMS mirror with latching arm for silicon photonics

et al. 2015

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We present an innovative rotational MEMS mirror that can control the direction of propagation of light beams inside of planar waveguides implemented in silicon photonics. Potential applications include but are not limited to optical telecommunications, medical imaging, scan and spectrometry. The mirror has a half-cylinder shape with a radius of 300 µm that provides low and constant optical losses over the full angular displacement range. A circular comb drive structure is anchored such that it allows free or latched rotation experimentally demonstrated over 8.5° (X-Y planar rotational movement) using 290V electrostatic actuation. The entire MEMS structure was implemented using the MEMSCAP SOIMUMPs process. The center of the anchor beam is designed to be the approximate rotation point of the circular comb drive to counter the rotation offset of the mirror displacement. A mechanical characterization of the MEMS mirror is presented. The latching mechanism provides up to 20 different angular locking positions allowing the mirror to counter any resonance or vibration effects and it is actuated with an electrostatic linear comb drive. An innovative gap closing structure was designed to reduce optical propagation losses due to beam divergence in the interstitial space between the mirror and the planar waveguide. The gap closing structure is also electrostatically actuated and includes two side stoppers to prevent stiction.

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Section: Introductionmentioning

confidence: 99%

Rotational MEMS mirror with latching arm for silicon photonics

et al. 2015

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“…However, the situation is rapidly changing with the upcoming new generation of wavefront compensation hardware: high-resolution liquid crystal (LC) spatial phase modulators and micro-electromechanical systems (MEMS) containing large arrays of LC cells or micro-mirrors. [1][2][3][4] These new devices can potentially provide wavefront shaping with spatial resolution on the order of 10 4 -10 6 elements. Such resolution is difficult to match with the traditional wavefront sensors used in adaptive optics: lateral shearing interferometer, 5,6 Shack-Hartmann, 7 curvature sensors, 8,9 etc.…”

Section: Introductionmentioning

confidence: 99%

<title>Advanced phase-contrast techniques for wavefront sensing and adaptive optics</title>

2000

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High-resolution phase-contrast wavefront sensors based on optically addressed phase spatial light modulators and micro-mirror/LC arrays are introduced. Wavefront sensor efficiency is analyzed for atmospheric turbulence-induced phase distortions described by the Kolmogorov and Andrews models. A nonlinear Zernike filter wavefront sensor based on an optically addressed liquid crystal phase spatial light modulator is experimentally demonstrated. The results demonstrate high-resolution visualization of dynamically changing phase distortions within the sensor time response of about 10 msec.

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“…In the field of optomechatronic systems, scanning mirrors or scanners have gathered a significant attention, since they are a fundamental element of a wide variety of devices, such as barcode readers, confocal microscopes and laser printers (Wu 1997, Urbach 1982, Miyajima 2003. Scanners project laser beams that are used, for example, to produce images by raster scanning or collect images in confocal microscopy.…”

Section: Introductionmentioning

confidence: 99%