A novel silicon micromachined moving-coil scanner with electromagnetic induction actuation principle is presented. It was manufactured by the Si-LIG process, silicon-lithography-electroforming (Galvanoformung, from German), where its mechanical structure was made by bulk silicon micromachining of 200 µm thick (1 0 0) silicon substrate, and its armature was patterned by deep UV lithography and Au electroplating. The monolithic mechanical structure is a 12 × 24 mm2 rectangular frame connected by 4.5 mm long torsion bars to a 4 × 10 mm2 rectangular rotor. On one face of the rotor is the armature, a 70 µm thick, single turn, electroplated Au coil with 3.3 mΩ electrical resistance. The other face of the rotor was mirrored by a 1480 Å thick Al film. An external magnetic circuit generated a constant 0.115 T magnetic field parallel to the coil plane and a 0.01 T (peak value) field normal to the coil plane. A maximum mechanical deflection angle of 9.0° pp at the 1311.5 Hz resonance frequency was measured, and a quality factor, Q, of 347 was achieved in air. A mathematical model for the device was derived and a dimensioning procedure was developed. The results show that electromagnetic induction actuation is adequate for mm-sized systems and capable of producing resonant scanners with performance compatible with applications such as bar code readers.
This paper presents a new scanning mirror structure. Large area (mm-order) scanning mirrors have been studied and developed due the many applications where mm-order light beam size is present like optical microscopes and instrumentation systems. In the proposed structure the actuation and reflection mechanisms were separated in order to provide a more flexible and accurated design that considers the specific needs of each one. The new structure consists of two square rotors linked to a fixed frame by two torsion bars, a third torsion bar connect both rotors. The electromagnetic induction actuated scanners were made using bulk silicon micromachinning technology, thin film techniques and mechanical assembly. The maximum optical deflection angle was 8.0 o pp at the first resonant frequency of 1316Hz with a quality factor of Q = 200. The second resonant frequency was 2542Hz with optical angle of 6 o pp and a quality factor of Q = 422.
Herein we present the pathological findings of different tuberculosis stages in Old and New World monkeys kept under human care in Rio de Janeiro, Brazil and naturally infected with Mycobacterium tuberculosis Complex. Fifteen nonhuman primates from five different colonies were incorporated into the study. There are 60% (9/15) Old World Monkeys and 40% (6/15) New World Monkeys. According to the gross and histopathologic findings, the lesions in nonhuman primates of this study are classified into the chronic-active, extrapulmonary, early-activation or latent-reactivation tuberculosis stage. Among the Old World Monkey, 66.7% (6/9) of nonhuman primates, all rhesus monkeys (Macaca mulatta), showed severe granulomatous pneumonia. In all Old World Monkeys cases, typical granulomas were seen in at least one organ regardless of the stage of the disease. In the New World Monkeys, the typical pulmonary granulomas were seen in 16.7% (1/6) of the cases, just in the latent-reactivation stage in Uta Hick’s Bearded Saki (Chiropotes utahickae). In this study, 66.7% (6/9) of Old World Monkeys (OWM) and 83.3% (5/6) of New World Monkeys (NWM) showed pulmonary changes at the histological evaluation. The tuberculosis diagnosis in the nonhuman primates in this study was based on pathological, immunohistochemical, molecular, and bacteriological culture. Although the typical presentation was observed in some cases, the absence of pulmonary granuloma did not exclude the tuberculosis occurrence in nonhuman primates of the Old and New World. Tuberculosis should be included as a cause of interstitial pneumonia with foamy macrophages infiltration in the New World nonhuman primates. Due to the high sensitivity of immunohistochemistry with Anti-Mycobacterium tuberculosis, we suggest the addition of this technique as a diagnostic tool of tuberculosis in the nonhuman primates even when the typical changes are not seen.
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