Integrated deformable mirror on silicon for optical data storage

Fanget, S.; Labeye, P.; Divoux, C.; Hugon, X.

doi:10.1117/12.589123

Cited by 3 publications

(1 citation statement)

References 1 publication

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“…Of these many-zone adaptive mirrors, some have sufficiently large stroke to perform significant defocus in addition to aberration correction. Our laboratory group [1,23,46,47] and Fanget et al [21] have followed a different approach: employing a small number of concentric electrodes to induce large defocus while preserving the ability to balance system spherical aberration. This approach minimizes the complexity (especially interconnect cabling complexity for miniaturized systems) and overall cost of the active optical system.…”

Section: Introductionmentioning

confidence: 99%

Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

et al. 2016

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Electrostatically actuated deformable mirrors with four concentric annular electrodes can exert independent control over defocus as well as primary, secondary, and tertiary spherical aberration. In this paper we use both numerical modeling and physical measurements to characterize recently developed deformable mirrors with respect to the amount of spherical aberration each can impart, and the dependence of that aberration control on the amount of defocus the mirror is providing. We find that a four-zone, 4 mm diameter mirror can generate surface shapes with arbitrary primary, secondary, and tertiary spherical aberration over ranges of ±0.4, ±0.2, and ±0.15 μm, respectively, referred to a non-normalized Zernike polynomial basis. We demonstrate the utility of this mirror for aberration-compensated focusing of a high NA optical system.

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Section: Introductionmentioning

confidence: 99%

Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

et al. 2016

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Semiconductor wafer bonding

Reiche

2006

Physica Status Solidi (a)

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When mirror-polished, flat, and clean wafers are brought into contact, they are locally attracted to each other and adhere or bond. This phenomenon is known as semiconductor wafer bonding. Different adhesion forces (van der Waals forces, hydrogen bonding) are the reason for the bonding effect at room temperature. The different bonding mechanisms acting in dependence on the surface conditions (hydrophilic, hydrophobic) are reviewed. Variations of the properties of bonded interfaces (structural, mechanical, electrical) during annealing are discussed. The focus is on low-temperature bonding techniques. Reasons for the formation of interface defects are presented. Applications of semiconductor wafer bonding for future developments are briefly summarized.

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Actuating methods of quasistatic micromirrors for active focus variation

Conrad

Klose

Sander

et al. 2008

2008 International Students and Young Scientists Workshop - Photonics and Microsystems

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For zoom and focus applications in the UV and IR spectral range mirrors with actively deformable surfaces are promising for reflective adaptive optics as an alternative to refractive optics. To realise an adjustable focus length interval from infinity to the centimetre range the needed surface deformation can be described by a hemisphere. For shorter focus lengths and optical on-axis applications the parabolic shape has to be used. The actuation principle of a quasistatic micromirror with actively deformable surface can be realised using electrostatic, ther-mo-mechanic, piezoelectric or electromagnetic effects. This paper compares electrostatic, thermo-mechanic and piezoelectric actuation methods for deformable micromirrors. Thereby models of curved thin plates and estimations on power consumption for low frequency or quasistatic operation are discussed. Due to the low power consumption and the low driving voltage, the piezoelectric effect is determined as most promisin g driving principle for devices used in mobile applications

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Integrated deformable mirror on silicon for optical data storage

Cited by 3 publications

References 1 publication

Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

Semiconductor wafer bonding

Actuating methods of quasistatic micromirrors for active focus variation

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