2008
DOI: 10.1016/j.jeurceramsoc.2008.05.008
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Influence of ZnO buffer layer on AZO film properties by radio frequency magnetron sputtering

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Cited by 67 publications
(22 citation statements)
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“…ZnO is a group II -IV semiconductor that has become one of the most promising candidates for potential applications in optoelectronics due to its wide band-gap (3.3 eV) and high exciton binding energy (60 meV) properties [1,2]. In order to optimize the structural, optical and magnetic properties of ZnO, a number of experiments have been done by various researchers either by using different capping agents or by doping ions into the ZnO lattice.…”
Section: Introductionmentioning
confidence: 99%
“…ZnO is a group II -IV semiconductor that has become one of the most promising candidates for potential applications in optoelectronics due to its wide band-gap (3.3 eV) and high exciton binding energy (60 meV) properties [1,2]. In order to optimize the structural, optical and magnetic properties of ZnO, a number of experiments have been done by various researchers either by using different capping agents or by doping ions into the ZnO lattice.…”
Section: Introductionmentioning
confidence: 99%
“…To obtain optimal deposition condition, it is necessary to select an efficient analysis method. Some researchers have obtained optimal condition for GZO film by using the Taguchi design method [13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…This leads to high lattice strain, more defects and misfit strain of the GZO thin films [13,18]. Therefore, several research groups have examined the growth of ZnO and GZO epitaxial thin films by introducing hetero-buffer layers, such as MgO, GaN and SiC or ZnO homo-buffer layer, to overcome these difficulties occurring in between the thin films and substrates [19][20][21][22][23][24]. Khranovskyy et al [22] have reported that the crystallinity, photoluminescence characteristics and electrical properties of epitaxial ZnO thin films grown on a Al 2 O 3 substrate at 300 1C, are improved by introducing a ZnO buffer layer compared to the properties of pure ZnO films grown on a nonbuffered substrate.…”
Section: Introductionmentioning
confidence: 99%