Herein, preparation of Ag2ZnSnSe4 (AZTSe) thin films using physical vapor deposition followed by selenization in a quartz tube with rapid thermal process (RTP) is reported. The precursor stacks, [Sn/Se/ZnSe/Se/Ag/Se] × 4, are deposited onto the glass substrate at 100 °C using the combination of thermal and e‐beam evaporation methods. The post selenization of precursors is conducted at different temperatures (300–425 °C). The X‐ray diffraction and Raman spectra of the precursor films selenized at 400 °C reveal the formation of single‐phase AZTSe, exhibiting a kesterite structure with a preferred orientation along the (112) plane. These films show larger grains of ≈230 nm with the homogeneous distribution of Ag, Zn, Sn, and Se across the film thickness. The precursor films selenized at temperatures ≤400 °C show the fundamental absorption edge of AZTSe (Eg = 1.36–1.44 eV) as well as an additional adsorption edge (Eadd = 1.31–1.32 eV) corresponding to ZnSn + SnZn defect complex. The Hall effect measurement indicates n‐type conductivity irrespective of selenization temperature. For films selenized at 400 °C, the carrier concentration is decreased to 2.83 × 1011 cm−3 and results in a high mobility of 73.9 cm2(V s)−1, which is attributed to the reduction of SnZn defects.