Influence of silicon nanocrystal size and density on the performance of non-volatile memory arrays

Optical Properties of Nanostructured Silicon

“…Si-QD memories, in which the SiO 2 layer is replaced by a Si NCs monolayer, have attracted considerable attention in the last few years [121,122] as one of the simplest evolutions of the standard flash technology allowing for improved reliability and scaling perspectives.…”

Integration of CVD silicon nanocrystals in a 32Mb NOR flash memory

“…Silicon nanocrystal (Si-NC) memories are one of the most promising solutions to push the scaling limits of Flash memories at least to the 32-20 nm technology nodes [1][2][3][4][5][6]. Due to their discrete nature, Si-NCs are robust to defects in the oxide.…”

“…Nevertheless, it should be stated that to date, the promising performances of Si-NC memories have been mainly demonstrated on single cells or medium-sized arrays (1)(2)(3)(4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16) [1][2][3][4][5][6]. An extensive set of experiments, including performance and reliability data of large-scale integrated memories should still be provided.…”

Observation of Quantum Confinement Effects with Ultrashort Excitation in the Vicinity of Direct Critical Points in Silicon Nanofilms

“…Polycrystalline silicon is considered an important component of the silicon-based integrated-circuit technology and is currently utilized in a wide range of devices applications [1][2][3]. Driven by the promising technological applications of the polycrystalline silicon films, significant progress has been made in understanding the structural, electrical, and optical properties of this material [4].…”