Journal of Nanoelectronics and Optoelectronics
 2015
DOI: 10.1166/jno.2015.1724
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Influence of RF Power on Optical and Surface Properties of the ZnO Thin Films Deposited by Magnetron Sputtering

Şuat Pat1,
Volkan Şenay2,
Soner Özen3
et al.
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Cited by 6 publications
(1 citation statement)
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“…As the selection of the RF sputtering method, the method has numerous superiorities such as process constancy, dependability, plasma production at low-temperature, high quality and uniform products and industrially practiced with desired chemical composition [23][24][25].…”
mentioning
confidence: 99%

Morphology, composition, structure and optical properties of CuO/Cu2O thin films prepared by RF sputtering method

Geçici
1
,
Korkmaz
2
,
Mohammadigharehbagh
3
et al. 2016
Vacuum
Self Cite
48
0
6
0
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“…As the selection of the RF sputtering method, the method has numerous superiorities such as process constancy, dependability, plasma production at low-temperature, high quality and uniform products and industrially practiced with desired chemical composition [23][24][25].…”
mentioning
confidence: 99%

Morphology, composition, structure and optical properties of CuO/Cu2O thin films prepared by RF sputtering method

Geçici
1
,
Korkmaz
2
,
Mohammadigharehbagh
3
et al. 2016
Vacuum
Self Cite
48
0
6
0
View full textAdd to dashboardCite

Fabrication and Annealing Temperature Optimization for a Piezoelectric ZnO Based MEMS Acoustic Sensor

Kumar
1
,
Prasad
2
,
Janyani
3
et al. 2019
Journal of Elec Materi
16
0
5
0
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Comparisons of surface and optical properties of the heavily carbon-doped GaN nanocrystalline films deposited by thermionic vacuum arc method

Pat
1
,
Özen
2
,
Şenay
3
et al. 2016
Vacuum
6
0
1
0
View full textAdd to dashboardCite
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