Influence of Pulse Bursts on the Specific Removal Rate for Ultra-fast Pulsed Laser Micromachining of Copper

Krämer, Thorsten; Neuenschwander, Beat; Jäggi, Beat; Remund, Stefan M.; Hunziker, Urs; Zürcher, Josef

doi:10.1016/j.phpro.2016.08.024

Cited by 31 publications

(20 citation statements)

References 6 publications

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“…As will be summarized in the following, both effect signal enhancement from the irradiated plume as well as the development of less deep craters are mutually dependent. Many experimental [ 7 , 8 , 14 , 16 , 19 , 57 , 58 , 59 , 66 , 88 , 89 , 90 , 91 , 92 , 93 , 94 , 95 , 96 , 97 , 98 , 99 , 100 , 101 , 102 , 103 , 104 , 105 , 106 , 107 , 108 , 109 , 110 , 111 , 112 , 113 , 114 ] and numerical [ 9 , 10 , 12 , 54 , 93 , 115 , 116 , 117 , 118 , 119 ] studies have been performed since the first observations about metal ablation with ultra-short double pulses were published. The following paragraphs summarize the findings to provide an overview of the effects involved in ultra-short double pulse laser ablation.…”

Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalsmentioning

confidence: 99%

“…If

and

are short compared to the intra-burst delay and

shows a value in the range of this delay, the energy specific volume obtained for a triple pulse only slightly differs from the one of single pulses, e.g., steel 1.4301 (AISI 304) shows such short delay times and was intensively investigated. Different reported maximum energy specific volumes for single, double, and triple pulses are summarized in Figure 8 a [ 14 , 19 , 23 , 24 , 102 , 107 ]. For pulses with a pulse duration of 10 ps, an intra-burst delay of 12 ns, and wavelengths of 1064 nm and 532 nm, the maximum energy specific volume slightly decreased for a triple pulse compared to a single pulse [ 14 , 102 , 107 ].…”

Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalsmentioning

confidence: 99%

“…Different reported maximum energy specific volumes for single, double, and triple pulses are summarized in Figure 8 a [ 14 , 19 , 23 , 24 , 102 , 107 ]. For pulses with a pulse duration of 10 ps, an intra-burst delay of 12 ns, and wavelengths of 1064 nm and 532 nm, the maximum energy specific volume slightly decreased for a triple pulse compared to a single pulse [ 14 , 102 , 107 ]. An almost identical behavior was observed for a 2 ps pulse duration but with higher ablated volumes due to the usage of shorter pulses [ 19 ].…”

Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalsmentioning

confidence: 99%

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Review on Experimental and Theoretical Investigations of Ultra-Short Pulsed Laser Ablation of Metals with Burst Pulses

et al. 2021

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Laser processing with ultra-short double pulses has gained attraction since the beginning of the 2000s. In the last decade, pulse bursts consisting of multiple pulses with a delay of several 10 ns and less found their way into the area of micromachining of metals, opening up completely new process regimes and allowing an increase in the structuring rates and surface quality of machined samples. Several physical effects such as shielding or re-deposition of material have led to a new understanding of the related machining strategies and processing regimes. Results of both experimental and numerical investigations are placed into context for different time scales during laser processing. This review is dedicated to the fundamental physical phenomena taking place during burst processing and their respective effects on machining results of metals in the ultra-short pulse regime for delays ranging from several 100 fs to several microseconds. Furthermore, technical applications based on these effects are reviewed.

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Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalsmentioning

confidence: 99%

“…If

and

are short compared to the intra-burst delay and

Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalsmentioning

confidence: 99%

Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalsmentioning

confidence: 99%

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Review on Experimental and Theoretical Investigations of Ultra-Short Pulsed Laser Ablation of Metals with Burst Pulses

et al. 2021

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“…Later, efficient laser ablation has been widely investigated by several scientific groups 27 – 36 . However, there are only a few attempts to analyse the ablation rate by taking into account the incubation effect and the saturation of the ablation depth for multi-pulse ablation 35 , 37 . The incubation phenomenon defines how the multi-pulse ablation threshold decreases with increasing number of pulses per spot 38 , 39 , and it was validated in many experimental occasions 40 – 42 .…”

Section: Introductionmentioning

confidence: 99%

Advanced laser scanning for highly-efficient ablation and ultrafast surface structuring: experiment and model

Žemaitis

Gaidys

Brikas

et al. 2018

Sci Rep

109

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Ultra-short laser pulses are frequently used for material removal (ablation) in science, technology and medicine. However, the laser energy is often used inefficiently, thus, leading to low ablation rates. For the efficient ablation of a rectangular shaped cavity, the numerous process parameters such as scanning speed, distance between scanned lines, and spot size on the sample, have to be optimized. Therefore, finding the optimal set of process parameters is always a time-demanding and challenging task. Clear theoretical understanding of the influence of the process parameters on the material removal rate can improve the efficiency of laser energy utilization and enhance the ablation rate. In this work, a new model of rectangular cavity ablation is introduced. The model takes into account the decrease in ablation threshold, as well as saturation of the ablation depth with increasing number of pulses per spot. Scanning electron microscopy and the stylus profilometry were employed to characterize the ablated depth and evaluate the material removal rate. The numerical modelling showed a good agreement with the experimental results. High speed mimicking of bio-inspired functional surfaces by laser irradiation has been demonstrated.

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“…Recently, a new technique, burst mode processing, was demonstrated for micromachining materials with far better efficiency than the conventional systems [ 17 , 18 , 19 , 20 , 21 , 22 ]. The stated technique utilizes the separation of energy of a single pulse into multiple pulses (burst) by a certain time delay.…”

Section: Introductionmentioning

confidence: 99%

Micromachining of Invar Foils with GHz, MHz and kHz Femtosecond Burst Modes

et al. 2020

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In this work, a burst mode laser is used for micromachining of 20 µm–250 µm thick Invar (Fe64/Ni36) foils. Holes were drilled by firing multiple pulses transversely onto the sample without moving the beam (percussion drilling). The utilized laser system generates a burst of a controllable number of pulses (at 1030 nm) with tunable pulse-to-pulse time spacing ranging from 200 ps to 16 ns. The sub-pulses within the burst have equal amplitudes and a constant duration of 300 fs that do not change regardless of the spacing in time between them. In such a way, the laser generates GHz to MHz repetition rate pulse bursts with a burst repetition rate ranging from 100 kHz to a single shot. Drilling of the material is compared with the non-burst mode of kHz repetition rate. In addition, we analyze the drilling speed and the resulting dependence of the quality of the holes on the number of pulses per burst as well as the average laser power to find the optimal micromachining parameters for percussion drilling. We demonstrate that the micromachining throughput can be of an order of magnitude higher when using the burst mode as compared to the best results of the conventional kHz case; however, excess thermal damage was also evident in some cases.

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Influence of Pulse Bursts on the Specific Removal Rate for Ultra-fast Pulsed Laser Micromachining of Copper

Cited by 31 publications

References 6 publications

Review on Experimental and Theoretical Investigations of Ultra-Short Pulsed Laser Ablation of Metals with Burst Pulses

Review on Experimental and Theoretical Investigations of Ultra-Short Pulsed Laser Ablation of Metals with Burst Pulses

Advanced laser scanning for highly-efficient ablation and ultrafast surface structuring: experiment and model

Micromachining of Invar Foils with GHz, MHz and kHz Femtosecond Burst Modes

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