Influence of Parameters of Fabrication on Quality and Performance of Superconducting MEM Switches

Brzhezinskaya, M. M.; Noel, Julien; Martínez, José A.; Hijazi, Y.; Vlasov, Yu. A.; Larkins, G.L.

doi:10.1109/tasc.2005.850190

Cited by 4 publications

(3 citation statements)

References 13 publications

(12 reference statements)

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“…Stress, Young's modulus, Poisson's ratio, and shear strength are important parameters to understand for devices characterisation and optimisation of their performance [13]. In addition, understanding the effects of cryogenic temperatures and systems operation over large temperature variations and its performance is an area of increasing importance to designers as they integrate switches into various subsystems where materials reliability is very important [15][16][17][18][19][20].…”

Section: Review Articlementioning

confidence: 99%

Review of the properties of gold material for MEMS membrane applications

Noel¹

2016

IET Circuits, Devices & Systems

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Materials selection for radio frequency (RF) microelectromechanical (MEM) switches application is important for overall design and fabrication of devices. The processing techniques and microstructures of the materials in these devices differ from the techniques used in bulk structures. Although the properties and morphology of a bulk material may be well characterised, thin film materials have properties substantially different. MEM switches for RF and cryogenic applications has been developed where the switch is integrated in a coplanar waveguide on a LaAlO 3 substrate as structure with a gold membrane bridge suspended above an area of the centre superconductor (YBa 2 Cu 3 O 7) covered with a BaTiO 3 dielectric. The gold (Au) membrane is actuated by the electrostatic attractive force acting between transmission line and the membrane when a dc control voltage is applied. The value of the actuation force greatly depends on the geometry and mechanical properties of the bridge material. A summary and review of the state-of-the-art in MEM switches using Au membrane elements is presented and its application for cryogenic temperature is discussed.

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Section: Review Articlementioning

confidence: 99%

Review of the properties of gold material for MEMS membrane applications

Noel¹

2016

IET Circuits, Devices & Systems

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“…Third, a "T" resonator was implemented in a coplanar transmission line where the notch frequency changed from 2 to 4 GHz when the switch at the base of the "T" was actuated [13]. Lastly, a switchable superconducting microwave through line and a bandpass filter were made and tested using series MEMS switches [14].…”

Section: A Previous Workmentioning

confidence: 99%

“…Fabrication of the described device required sequential use of four masks [14]. The masks were done using Ektagraphic slide film.…”

Section: A Mask Designmentioning

confidence: 99%

Design and Fabrication of Two Switch Superconducting Microstrip Hairpin Filters Using Series MEMS Switches

Vargas

Noel

Brzhezinskaya

et al. 2007

IEEE Trans. Appl. Supercond.

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A superconductor circuit based on series MicroElectro-Mechanical (MEM) switches is utilized to switch between two bandpass hairpin filters with 200 MHz bandwidth and nominal center frequencies of 2.1 GHz and 2.6 GHz. This is accomplished using 4 switches actuated in pairs, one pair at a time. When one pair is actuated the first bandpass filter is coupled to the input and output ports. When the other pair is actuated the second bandpass filter is coupled to the input and output ports, thus corresponding output responses are obtained.The device is made of YBa 2 Cu 3 O 7 thin film deposited on a 20 mm 20 mm LaAlO 3 substrate by pulsed laser deposition. BaTiO 3 deposited by RF magnetron sputtering is utilized as the insulation layer at the switching points of contact. Fabrication details are discussed along with simulation data and test results.

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