In p-GaN gate AlGaN/GaN power devices, turn-off energy loss (E off) variations in die-level uniformity are observed because of the thickness variations of remained p-GaN in the ungated region. These E off variations can be reduced by negative turn-off gate voltages. However, this method can induce new burden in circuit design because of the negative voltages. Therefore, we focus on fabrication processes such as Mg doping in p-GaN gate. Using low Mg doping in p-GaN gate, E off variations mostly disappear, but threshold voltage (V th) is approximately 0.3 V decreases. In addition, dynamic on-resistance (dynamic R ds,on) is slightly increased.