Influence of eccentric nanoindentation on top surface of silicon micropillar arrays

Puranto, Prabowo; Zhang, Qiang; Nyang’au, Wilson Ombati; Langfahl-Klabes, Jannick; Thiesler, Jan; Zackaria, Mutaib; Li, Zhi; Wasisto, Hutomo Suryo; Peiner, Erwin; Brand, Uwe

doi:10.1088/1742-6596/1837/1/012008

Cited by 2 publications

(1 citation statement)

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“…Besides Raman spectroscopy, which is considered as an indirect mechanical testing method, nanoindentation had been employed in our previous investigation to directly characterize the mechanical properties of Si nanowires 29 , 68 , 69 . Here, Young’s modulus and hardness of vertical Si nanowires with different crystal orientations (i.e., Si <100> , Si <110> , and Si <111>) were determined.…”

Section: Resultsmentioning

confidence: 99%

Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

Refino

Yulianto

Syamsu

et al. 2021

Sci Rep

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Production of high-aspect-ratio silicon (Si) nanowire-based anode for lithium ion batteries is challenging particularly in terms of controlling wire property and geometry to improve the battery performance. This report demonstrates tunable optimization of inductively coupled plasma reactive ion etching (ICP-RIE) at cryogenic temperature to fabricate vertically-aligned silicon nanowire array anodes with high verticality, controllable morphology, and good homogeneity. Three different materials [i.e., photoresist, chromium (Cr), and silicon dioxide (SiO2)] were employed as masks during the subsequent photolithography and cryogenic ICP-RIE processes to investigate their effects on the resulting nanowire structures. Silicon nanowire arrays with a high aspect ratio of up to 22 can be achieved by tuning several etching parameters [i.e., temperature, oxygen/sulfur hexafluoride (O2/SF6) gas mixture ratio, chamber pressure, plasma density, and ion energy]. Higher compressive stress was revealed for longer Si wires by means of Raman spectroscopy. Moreover, an anisotropy of lattice stress was found at the top and sidewall of Si nanowire, indicating compressive and tensile stresses, respectively. From electrochemical characterization, half-cell battery integrating ICP-RIE-based silicon nanowire anode exhibits a capacity of 0.25 mAh cm−2 with 16.67% capacity fading until 20 cycles, which has to be improved for application in future energy storage devices.

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Section: Resultsmentioning

confidence: 99%

Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

Refino

Yulianto

Syamsu

et al. 2021

Sci Rep

Self Cite

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Imaging the mechanical properties of nanowire arrays

Ma,

Fahrbach,

et al. 2024

Tm - Technisches Messen

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Dimensional and contact resonance (CR) images of nanowire (NW) arrays (NWAs) are measured using our newly developed microprobe CR imaging (CRI) setup. Then a reference method is employed to calculate the indentation modulus of NWs (M i,NW ) representing the elasticity of NWs, by measuring NWAs and reference samples at the same static probing force. Furthermore, topography is imaged in combination with CR and M i,NW separately by software, in which the z values indicate the topography of the NWs and the color bars show its CR or M i,NW . Then NWs’ topography relation to M i,NW is visualized. As typical examples, 3D imaging of topography and measurement of M i,NW is performed with Si<111> pillar arrays as well as Cu and ZnO NWAs. The novel method enables fast mechanical performance measurements of large-scale vertically-aligned NWAs without releasing them from their respective substrates. For instance, the diameter and pitch of the Si<111> pillars and the diameter of the Cu NWAs are in good agreement with the values measured by scanning electron microscopy (SEM). The position of ZnO NWs bunches grown at arbitrary sites on silicon can be identified with the help of combined topography and indentation modulus images. Furthermore, M i,NW measured by our homemade CRI setup agrees well with bulk values. Differences between the measured M i,NW and bulk M i values may be related to a size effect in NW elasticity.

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Influence of eccentric nanoindentation on top surface of silicon micropillar arrays

Cited by 2 publications

References 4 publications

Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

Imaging the mechanical properties of nanowire arrays

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