Inelastic deformability of nanopillar by focused-ion-beam chemical vapor deposition

Shibutani, Yoji; Yoshioka, Toshiyuki

doi:10.1116/1.2830683

Cited by 3 publications

(3 citation statements)

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“…Therefore, the flexural rigidities E 1 I 1 of a-C pillars can be obtained from Eq. 9 These flexural rigidities for samples with diameters of 160-210 nm agree well with the predicted value of resonant vibration frequency, and it can be understood that E 1 I 1 is proportional to the fourth power of the diameter, i.e., the geometric moment of inertia. Table II summarizes the flexural rigidity for each diameter, which is calculated by the fitted parameter a 1 = ␣ ‫ء‬ in Table I.…”

Section: ͑3͒supporting

confidence: 79%

“…9 Considering the above remarks, we assume that the material nonlinearity based on the internal structural change of a-C is the critical factor of the weakening stiffness, as mentioned in a previous paper. Additionally, we also estimate that the cross-sectional deformations are enough small because the thicknesses of amorphous carbon are at least half of the radii of any a-C pillars.…”

Section: Discussion Of Large Deflections Of A-c Pillarsmentioning

confidence: 99%

“…The linear mechanical response of the whole a-C pillar can be determined based on the fundamental physical properties such as density and Young's modulus, and they have already been investigated by the dynamic resonance vibration or the quasistatic infinitesimal bending with the piezoactuator. 9 These curious mechanical and structural properties promote a coherent understanding of a-C pillars as a deformable body, and they are useful for practical applications for micromechanical systems. 8 Moreover, it was recently found that the pillar possesses a large nonlinear deformability like rubber without any fracturing.…”

Section: Introductionmentioning

confidence: 99%

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Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing

Tanaka

Shinkai

Shibutani

et al. 2009

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition Mechanical characteristics and its annealing effect of diamondlike-carbon nanosprings fabricated by focused-ionbeam chemical vapor deposition J. Vac. Sci. Technol. B 23, 2801 (2005); 10.1116/1.2132329Density estimation for amorphous carbon nanopillars grown by focused ion beam assisted chemical vapor deposition J.Nanopillars with nanosized diameter and microsized length can be constructed by chemical vapor deposition using a focused ion beam. For a pillar consisting of an outer amorphous carbon ring and an inner gallium core, we performed the bending tests using the unique double-cantilever specimen joining two pillars together by an electron-beam deposition technique in a scanning electron microscope. The precise load-deflection curves indicate that the pillars have a nonlinear softening region after the linear response as the diameter increases. However, pillars finally become extremely hardened at the large deformation. Thus, the pillar intrinsically possesses much more flexibility and stable deflection for bending than expected, in contrast to tensile deformation. The bending rigidity obtained by the infinitesimal deflection corresponds well to that by the resonance vibration tests reported so far. It also certifies that the proposed double-cantilever bending method can maintain high accuracy for the nanoscaled materials testing.

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Section: ͑3͒supporting

confidence: 79%

Section: Discussion Of Large Deflections Of A-c Pillarsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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