Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition Mechanical characteristics and its annealing effect of diamondlike-carbon nanosprings fabricated by focused-ionbeam chemical vapor deposition J. Vac. Sci. Technol. B 23, 2801 (2005); 10.1116/1.2132329Density estimation for amorphous carbon nanopillars grown by focused ion beam assisted chemical vapor deposition J.Nanopillars with nanosized diameter and microsized length can be constructed by chemical vapor deposition using a focused ion beam. For a pillar consisting of an outer amorphous carbon ring and an inner gallium core, we performed the bending tests using the unique double-cantilever specimen joining two pillars together by an electron-beam deposition technique in a scanning electron microscope. The precise load-deflection curves indicate that the pillars have a nonlinear softening region after the linear response as the diameter increases. However, pillars finally become extremely hardened at the large deformation. Thus, the pillar intrinsically possesses much more flexibility and stable deflection for bending than expected, in contrast to tensile deformation. The bending rigidity obtained by the infinitesimal deflection corresponds well to that by the resonance vibration tests reported so far. It also certifies that the proposed double-cantilever bending method can maintain high accuracy for the nanoscaled materials testing.