Size effects on deformation mechanism of nanopillars by FIB-CVD using double-cantilever testing

Shibutani, Yoji; Nakano, Takuya; Tanaka, Hiro; Kogo, Yasuo

doi:10.1557/jmr.2011.344

J. Mater. Res.

2011

DOI: 10.1557/jmr.2011.344

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Size effects on deformation mechanism of nanopillars by FIB-CVD using double-cantilever testing

Yoji Shibutani

Takuya Nakano

Hiro Tanaka

et al.

Abstract: Abstract

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Size effects on deformation mechanism of nanopillars by FIB-CVD using double-cantilever testing

Abstract: Abstract

Cited by 0 publications

References 10 publications

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