Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer

Said, Maroua; Tounsi, Farès; Mezghani, Brahim; Ahmed, Aftab; Pandit, Shubha; Patkar, Rajul; Dixit, Pradeep; Baghin, M.S.; Rao, V. Ramgopal

doi:10.1109/ssd.2018.8570360

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Induced Stress Enhancement Using U-shaped Arms in a 3-Axis Piezoresistive MEMS Accelerometer

Cited by 3 publications

References 13 publications

Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor

Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor

Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

Dynamic Behaviour and Piezoresistive Analysis of a Single Mass 3-Axis Polymer MEMS Accelerometer

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