Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor

Kumar, Ajai; Prasad, Mahanth; Janyani, Vijay; Yadav, R. P.

doi:10.1007/s00542-019-04524-x

Cited by 22 publications

(8 citation statements)

References 55 publications

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“…Through CAD tool, Si-diaphragm thickness of the sensor was optimized. Kumar et al proposed the structure of sensors and optimized the dimensions of the diaphragm for a range of 100-180 dB and large bandwidth of 22 kHz with finite element method [9]. In their work, the ZnO thin film was deposited using radio frequency (RF) sputtering technique.…”

Section: Piezoelectric Acoustic Sensormentioning

confidence: 99%

A Review on the High Sound Pressure Level Acoustic Measurement in the Aerospace Field

Chen

Qin

et al. 2023

Journal of Sensors

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Noise could occur anywhere in the aerospace and other fields and has a great influence on the operation of the aircraft. The control of the sound emission has attracted a lot of attention from the economic and environmental aspects. Firstly, the noise is annoying for the passengers and pilot and may increase the risk to be exposed for the military applications. Secondly, the sound emission may pose a great damage and threat to the engine equipment due to the strong pressure oscillation. In addition, the combustion noise may also have a great influence on the combustion process in the engine, which may lead to the emission increase and low-efficiency operation. The noise emission measurement is necessary and very important for the research in aerospace field. The aircraft in aerospace field usually works in the extreme environment, and the noise emission is within a high sound pressure level, which is quite from the acoustic measurement in other fields. Thus, we give a short review to introduce the high sound pressure level acoustic measurement in the aerospace field.

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Section: Piezoelectric Acoustic Sensormentioning

confidence: 99%

A Review on the High Sound Pressure Level Acoustic Measurement in the Aerospace Field

Chen

Qin

et al. 2023

Journal of Sensors

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“…Yoshiki et al [122] developed an electroless deposition process for copper deposition with improved adhesion on the smooth glass substrate without surface etching. ZnO thin films have applications in chemical sensors [164][165][166][167][168][169][170][171][172], piezoelectric transducers [173][174][175][176][177][178], and photovoltaics [179][180][181][182][183][184]. ZnO thin film between the electroless deposited metal film and glass act as a unique adhesive layer.…”

Section: Zno Thin-film-based Electroless Depositionmentioning

confidence: 99%

A critical review of copper electroless deposition on glass substrates for microsystems packaging applications

Pawar

Dixit

2022

Surface Engineering

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This article reviews the state-of-the-art electroless copper deposition on glass substrates and the associated challenges.The well-known issue of poor adhesion of electroless copper with the glass substrate was addressed and later, improved bymodifying the surface energy using a specific chemical treatment or by creating localized surface roughening. Localized surfaceregions in the glass were created by abrasive-based ultrasonic machining and hightemperature electrochemical-discharge machiningtechniques. The effect of critical process parameters on the surface roughness and morphology was explained. Both qualitative andquantitative adhesion measurement techniques, such as cross-hatch tests and 90°/180°p eel adhesion tests, were presented. Theadhesion strength is affected by the surface roughness of the substrate and residual stress build-up in the film. As the build-up stresscan be released by the post-deposition annealing, the adhesion strength is further increased. Finally, the electroless coppertechnology in making through-glass-vias and embedded redistribution lines are presented.

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“…After TiO 2 , ZnO is the second most studied photocatalyst for photocatalytic water/air treatment. It possess properties close to that of TiO 2 in terms of light absorption and photocatalytic activity, but its peculiar optical and piezoelectric abilities makes it also suitable for optoelectronic applications like light emitting diodes [45] or piezoelectric material [46]. In addition, ZnO is a cheap and nonhazardous material, easily synthesized with multiple liquid or gas phase processes.…”

Section: Zinc Oxide (Zno)mentioning

confidence: 99%

TiO 2 , ZnO, and SnO 2 -based metal oxides for photocatalytic applications: principles and development

Ishchenko¹,

Rogé²,

Lamblin³

et al. 2021

Comptes Rendus. Chimie

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Design, fabrication and reliability study of piezoelectric ZnO based structure for development of MEMS acoustic sensor

Cited by 22 publications

References 55 publications

A Review on the High Sound Pressure Level Acoustic Measurement in the Aerospace Field

A Review on the High Sound Pressure Level Acoustic Measurement in the Aerospace Field

A critical review of copper electroless deposition on glass substrates for microsystems packaging applications

TiO 2 , ZnO, and SnO 2 -based metal oxides for photocatalytic applications: principles and development

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