Dynamic Behaviour and Piezoresistive Analysis of a Single Mass 3-Axis Polymer MEMS Accelerometer

Khlifi, Awatef; Mezghani, Brahim; Tounsi, Farès; Ahmed, Aftab; Pandit, Shubha; Patkar, Rajul; Dixit, Pradeep; Baghini, Maryam Shojaei

doi:10.1109/dtss.2019.8915018

Cited by 2 publications

(1 citation statement)

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“…Acceleration along the x - or y -axis is detected by deformation of the beams while z -axis acceleration is detected by deflection of the proof mass . This same group reported the frequency study of the device in another work; a proof mass of 1170 μm × 1170 μm × 292 μm has resonant frequency of 1.0847 kHz . Yu et al simulated a triaxial sensor that has a very high acceleration range, 1.2 μV/( g /V) theoretical sensitivity and resonant frequency of 1 MHz.…”

Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%